0190-02853 | 6" VAT GATE H-ANODAZED , PERF , AMAT P5000 |
0040-09069 | CABLE ASSY, STAINLESS WIRES, AMAT P5000 |
0020-32364 | BRACKET, RECESSED ENDPOINT, AMAT P5000/P5200 |
0050-30761 | TUBE, GAS SUPPLY, SGD, AMAT P5000/P5200 |
715-011531-008 | UPPER ELECTRODE , RAINBOW 4420 |
718-098591-001 | SEAL PLATE, S-65 PENDULUM VALVE (VAT P/N : 200500 ), LAM TCP9600 |
718-098592-001 | LOCK RING, S-65 PENDULUM VALVE (VAT P/N : 202046 ), LAM TCP 9600 |
0020-32836 | HINGE, REMOVABLE, RIGHT SLIT VALVE, AMAT P5000 |
0020-32837 | HINGE, REMOVABLE, LEFT SLIT VALVE, AMAT P5000 |
0010-70161 | DOOR, SLIT VALVE ASSY, AMAT P5000 |
00020-31490 | GDP, 37 HOLES, MxP, T=0.078", AMAT P5000 MxP |
0020-70433 | HINGE, RIGHT SLIT VALVE |
0020-70432 | HINGE, LEFT SLIT VALVE |
0010-09088 | P5000 ROBOT ALIGNMENT TOOL |
5010-01017 | THREAD LOCKING BEARING ( FOR P5000 ROBOT BLADE) |
0010-10982 | Shell ESC ASSY, MxP+, OXIDE, 150MM, FLAT, BRAND NEW |
0200-34040 | LIFT PIN, A6061+ANOD, L=50MM |
0021-09105 | LIFT PIN, A6061+ANOD, L=56MM, ADJUSTABLE |
0020-32260 | GDP, 37 HOLES, MxP, T=0.156", AMAT MxP |
0020-31493 | GDP, 133 HOLES, T=0.078", AMAT MxP |
0020-09860 | FRONT SHOE, 150MM |
3690-03341 | SCREW, P5000 TOP COVER, 1/4 * 1.5L, HEX SST |
3690-02746 | SCREW, P5000 TOP COVER, 1/4 * 1.5L, HEX SST |
715-011622-221 | LFTR,WFR 4-PIN FLEX ULTEM |
0020-30854 / 0020-19896 | GDP, MODIFIED,96-GAS HOLES, MARK II, H-ANOD, 8-SCR-HOLES |
0010-75100 | THROTTLE VALVE ASSY, MxP |
0020-32259 | GDP, 119 Holes, T=0.156", AMAT MxP |
0020-31463 | CARRIER CLAMP, COMPLIANT, EXT CATHODE |
0020-30482 | COUPLING FLEX |
0020-30198 | TUBE EXTERNAL TAPERED EXT CATHODE |
0020-31147 | INSERT BASE AL 150/200MM FLAT (Extender Cathode Cylinder (Poly M-Chuck) |
0020-31767 | CYLINDER, CLAMPING ,200MM POLY/WSI |
0010-09985 | PEDESTAL ASSY, 200MM, POLY/WSI, NOTCH, 2 |
839-093786-001 | Bellow, VAT Gate Valve, 149.1mm, Short Adaptor |
0015-09055 | Sleeve Susceptor Bellow |
3870-03605 | Cylinder ,HDP Gate Valve |
0015-09056 | Wafer Lift Bellow, CVD Chamber |
0015-09056 | Wafer Lift Bellow, CVD Chamber |
80-080-072 | Pin Cylinder, Tegal 90X |
80-080-077 | Chuck Cylinder, Tegal 90X |
3422001501 | JUSUNG BELLOW, O3 CHAMBER PEDESTAL LIFTER |
34220012 | JUSUNG BELLOW, TiN CHAMBER PEDESTAL LIFTER, TUBE |
34220016 | JUSUNG BELLOW, TiN CHAMBER PEDESTAL LIFTER |
001-9093-05 | WELD BELLOW, JUSUNG, BROOKS ROBOT USE |
EV-3M-24 | CLIPPARD VALVE, 24V , FOR P5000 (N/C) |
3870-01445 | VALVE ASSY RAPID EXHAUST1/8 NPT, QUICK RELEASE VALVE |
0015-70041 | ASSY CAM FOLLOWER CROWNE |
0040-20146 0040-75904 | BELLOWS, ORIENTER CHAMBER |
0200-09657 | WINDOW,RECESSED ENDPOINT |
0020-09005 | WINDOW QUARTZ, VIEW PORT |
0200-09326 | DC PLUG, POLY GRAPHITE 150MM |
0200-10246 | GDP, UNI-INSERT, LINER, 88 HOLES, QUARTZ |
0200-10243 | SHADOW RING, 150MM, FLAT, QUARTZ |
0200-10073 | INSULATING PIPE, QUARTZ |
0200-10133 | QUARTZ WINDOW |
0090-09016 | FEEDTHRU CAP. SENSOR ASSY, OEM NEW |
0090-09016 | FEEDTHRU CAP. SENSOR ASSY, 2ND NEW |
0190-13175 1120-00830 | Light Pen, 5V, 20mA, W/Phone Jack Connector |
0100-09042 | OPTO SENSOR W/PCB ASSY |
15-650-PP | LIQUID LEVEL SWITCH |
0100-09139 | ROBOT INTERCONNECT BD |
0100-09080 | ROBOT CAP SENSOR INTERCONNECT BD |
3310-01022 | FLOW INDICATOR |
0100-09086 | STEPPER POWER DRIVE BOARD |
3310-01012 | TC GAUGE, 1/8" NPT |
3310-01074 | TC GAUGE, 1/4"VCR, FEMALE |
0150-76132 | CABLE ASSY ESC STANDARD |
0150-76132A | CABLE ASSY ESC STANDARD , DUAL SHIELDED |
0090-09006 | REED SWITCH ASSY, FOR P5000 SLIT VALVE |
0100-20078 | LASER DRIVER DOARD |
1140-00023 | PWRSP DC QUAD 5V 12V -12V 3.3-24V 350W 85-264VAC IN END-MNT FAN CHASSIS |
0150-09054A | CABLE ASSY, RF MATCH, DUAL SHIELDED |
0090-09151 | P5000 HV CABLE ASSY, FOR SIMPLE CATHODE (ESC ) |
0620-01245 | P5000 HV CABLE ASSY, FOR SIMPLE CATHODE (H.V ) |
0150-09800 | P5000 HV CABLE ASSY, FOR STANDARD CATHODE |
0020-34046*1ea | P5000 HV CONN HIGH VOLTAGE, FOR SIMPLE CATHODE |
0020-31557 | P5000 HV CONN HIGH VOLTAGE, FOR STANDARD CATHODE |
0150-70019 | 37PIN RIBBON CABLE, ROBOT INTERCONNECT BOARD |
0140-70085 | HARNESS CASSETTE HANDLER INTER. W/BRAKE |
0910-01255 | FUSE, 1/2A QCK-ACTING, 125V MELF |
0910-01256 | FUSE, 1A QCK-ACTING, 125V MELF |
0910-01253 | FUSE, 2A QCK-ACTING, 125V MELF |
0910-01277 | FUSE, 3A QCK-ACTING, 125V MELF |
0910-01254 | FUSE, 5A QCK-ACTING, 125V MELF |
0910-01287 | FUSE, 7A QCK-ACTING, 125V MELF |
0190-09372 | ASSY, TC, HTR, WxZ |
3310-01071 | TC GAUGE, 1-1000 MTORR METALTUBE 1/8INCH IPS |
1140-01337 | POWER SUPPLY DC +5V +12V 150W 85-264VAC FOR ENDPOINT SYSTEM |
1400-30700 | MAGNET SENSOR ASSY, LIFT CYLINDER, MxP+ |
0090-75009 0090-02952 | MOTOR ENCODER ASSY, P5000 ROBOT, ROTATION |
0090-75010 0090-02953 | MOTOR ENCODER ASSY, P5000 ROBOT, EXTENSION |
715-012143-001 | PULLEY SET, 108 TEETH, MOTOR MOUNT, LAM HARMONIC |
715-012049-001 | PULLEY SET, 15 TEETH, LAM HARMONIC |
0150-70018 | CABLE ASSY, ENCODER, FLAT FLEX, 34 POS |
0150-70017 | CABLE ASSY, ENCODER, FLAT FLEX, 6 POS |
853-017637-001 | STEP MOTOR ASSY, EXT, PLASTIC CONNECTOR, LAM HARMONIC ARM |
853-017637-002 | STEP MOTOR ASSY, ROT, PLASTIC CONNECTOR, LAM HARMONIC ARM |
0090-75008 0090-02981 | MOTOR BRAKE ENCODER ASSY(FOR STORAGE/CASSETTE ELEVATOR) |
3700-01221 | SEAL,LINEAR RADIAL 50SFT, P5000 BEARING ASSY |
0020-76065 | Idle Gear for P5000 Robot |
0020-06047 | BEARING THROTTLE VALVE, POM |
0020-06048 | BUSHING, THROTTLE VALVE, TEFLON |
0020-32365 | FILTER,UV, RECESSED ENDPOINT |
0020-32141 | FEEDTHRU, HELIUM, 2 PASS , P5000 ESC |
0020-32142 | PLUG, FEEDTHRU, VESPEL |
0020-04160 | SPACER CIRCULAR RING, EXT CATHODE , POLYSULFONE, NEW |
3700-01484 | SEAL DYN EXT RADIAL, 1.241 OD * .998 ID * .235W |
3700-01485 | SEAL DYN ROT RADIAL, 2.243 OD * 2.0 ID * .235W |
0020-04277 | FLANGE INSULATING TAPER, EXT CATHODE |
0020-03426 | PLUG, VESPEL, FOR 200MM PEDESTAL SCREW HOLE |
'0.1UM ENTEGRIS FILTER 3/4 '1220-269 ENTEGRIS ENTEGRIS SPLASH GUARDS(DELETED) '151-140-01 ENTEGRIS 01KIT,DISP.HEAD KEY,CHNG-OUT,NITRIC ACID '151-140-02 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,H2S04 '151-140-03 ENTEGRIS KIT,DISP.HEAD KEY, AMMONIUM HYDROXIDE29% '151-140-05 ENTEGRIS DHT KEY CODE RING, HCL '151-140-06 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,HF49% '151-140-08 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,H3P04-85% '151-140-09 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,H202 31% '151-140-10 ENTEGRIS KIT,DISPENSE HEAD KEY CODE RING '151-140-13 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,IPA '151-14