| '0103-101278 | NOVELLUS | 472 FLOPPY DRIVE |
| '0117-101701 | NOVELLUS | XTMR, PRESSURE PTX510 0117-101701 |
| '0125-101881 | NOVELLUS | SWITCH SAFETY-INTERLOCK 30VDC,18AMP |
| '0125-105058 | NOVELLUS | PCB/IBM/PA MUX INTERFACE |
| '0125-107537 | NOVELLUS | 1/2 LENGTH DIGI BOARD |
| '0125-110223 | NOVELLUS | 472, PENTIUM PC BOARD, COUNTER TIMER BOA |
| '02-00274-00 | NOVELLUS | ASSY, OVERTEMP, WCVD |
| '02-00430-04 | NOVELLUS | KIT-PADDLE 200MM,EXT D P,FORM |
| '02-032454-00 | NOVELLUS | KIT,200MM GAS DIST PLATE ADJ |
| '02-042057-00 | NOVELLUS | PCB ASSY INTLK BOARD CVD-TIN |
| '02-048027-00 | NOVELLUS | ASSY, OVERTEMP |
| '02-049582-01 | NOVELLUS | ASSY VALVE HEATER CLAMP |
| '02-049582-02 | NOVELLUS | ASSY VALVE HEATER CLAMP |
| '02-054427-00 | NOVELLUS | KIT RING LIFT |
| '02-057442-00 | NOVELLUS | PRISM, PNEUMATIC MANIFOLD |
| '02-10387-0046 | NOVELLUS | 2 LINE BELL JAR |
| '02-122840-00 | NOVELLUS | ASSY,2 PC WFR LIFT PIN,WCVD |
| '02-162351-00 | NOVELLUS | ASSY, |
| '02-255013-00 | NOVELLUS | UNIT R RF MATCH |
| '02-258799-00 | NOVELLUS | ASSY,HTR BLK,2&3KW,6FORKS,SEQUEL |
| '02-263840 | NOVELLUS | STAGE ASSY.SINGLE HEATER GAM |
| '02-2880 | NOVELLUS | ACCESS DOOR PANEL |
| '02-3037 | NOVELLUS | DIAPHRAGM, PRESSURE RELIEF |
| '02-3696 | NOVELLUS | RIGHT CHAMBER ACCESS,PLASMA PANEL |
| '02-3697 | NOVELLUS | REAR ACCESS COVER |
| '02-3706 | NOVELLUS | LEFT CHAMBER ACCESS,PLASMA PANEL |
| '0250-104021 | NOVELLUS | SWITCH, DOOR 15A SPDT |
| '0275-103567 | NOVELLUS | SENSOR KEYENCE,FIBER-OPTIC LINE |
| '0275-103753 | NOVELLUS | TRANSDUCER,FLOW VELOCITY |
| '03-00197-00 | NOVELLUS | CABLE-PIN LIFT |
| '03-00258-00 | NOVELLUS | SHWRHD,200MM,STYLE B |
| '03-042282-00 | NOVELLUS | CABLE ASSY |
| '03-042299-00 | NOVELLUS | CABLE ASSY |
| '03-053085-04 | NOVELLUS | CABLE ASSY |
| '0350-102106 | NOVELLUS | BOWL SEAL |
| '04-00060-00 | NOVELLUS | KIT, WCVD FILTERS |
| '04-0050 | NOVELLUS | TUBE, PLASMA,CERAMIC, 8.66 LONG |
| '04-052637-00 | NOVELLUS | KIT,PM,FILTERS,ALTUS-S |
| '04-058412-00 | NOVELLUS | KIT,RETRO,RF SIG,ENHANCED |
| '05-00010-00 | NOVELLUS | PM KIT N2 FILTER |
| '05-00012-00 | NOVELLUS | KIT, PM OVERHAUL WTM |
| '05-00066-00 | NOVELLUS | KIT PM REACT 200MM |
| '05-00077-00 | NOVELLUS | KIT PM ROBOT SEALS |
| '05-00107-00 | NOVELLUS | KIT-PM UPPER MANIFOLD GAS FILTERS |
| '05-00108-00 | NOVELLUS | PM KIT, LOAD LOCK FILTERS C1-W |
| '05-00109-00 | NOVELLUS | KIT-PM GAS FILTERS C1W |
| '05-00110-00 | NOVELLUS | PM KIT TEE SEALS C1W |
| '05-041157-00 | NOVELLUS | KIT,RETFIT 7 OUTPUTS PS |
| '05-10350-00 | NOVELLUS | KIT-PIN LIFT SEAL |
| '05-104222-00 | NOVELLUS | KIT,RETROFIT,ION SOURCE,MATCH |
| '05-117163-00 | NOVELLUS | KIT RETROFIT LL DOOR BYPASS |
| '05-119299-01 | NOVELLUS | MONITOR, MAINT, LCD UPGRADE KIT |
| '05-148374-00 | NOVELLUS | KIT SENSOR PRISM SPINDLE UP/DN |
| '05-2854 | NOVELLUS | APPLICATOR,ONE-PIECE (SIX POST) |
| '05-50102-02 | NOVELLUS | R LFC 5ML ED |
| '06-0091 | NOVELLUS | CHAMBER,PLASMA,QUARTZ,4MM |
| '06-2640 | NOVELLUS | SPOOL,PLASMA,QUARTZ,PEP-1 |
| '06-2679 | NOVELLUS | SPOOL QUARTZ |
| '06-2706 | NOVELLUS | COLLAR, QUARTZ |
| '0700-103198 | NOVELLUS | SEAL DOOR 280 WHT VIN LOCKING |
| '0710-102134 | NOVELLUS | BLOCK 472,REAR STOP INVERTED UNLOAD CAS |
| '0710-102146 | NOVELLUS | SPACER 472, REAR INVERTED UNLOAD CASS |
| '0710-103837 | NOVELLUS | SEAL DOOR 8201 |
| '0710-104029 | NOVELLUS | SEAL EPDM |
| '0710-104119 | NOVELLUS | 472,POLISH ARM COVER STANDOFF, LATCHPAWL |
| '0710-104158 | NOVELLUS | 472, POLISH ARM COVER PAWL, MOD. LATCH |
| '0710-104159 | NOVELLUS | 472, POLISH ARM COVER PAWL, MOD LATCH .6 |
| '0710-106576 | NOVELLUS | COUPLING,FLEXIBLE |
| '0710-107555 | NOVELLUS | TURN BUCKLE, ARM PIVOT |
| '0710-107557 | NOVELLUS | CLEVIS,TRANSDUCER,DOWNFORCE P |
| '0720-103585 | NOVELLUS | BRACKET,DOJEN LS CON.P/ARM DR0720-103583 |
| '0720-103586 | NOVELLUS | BRACKET,DOJEN RS CON P/ARM DR0720-103586 |
| '0720-106699 | NOVELLUS | RING,FLOATING DR200MM 0720-106699 |
| '0750-105094 | NOVELLUS | GASKET EPDM 100X10X4 ELEC/PNEU CASE |
| '0750-105095 | NOVELLUS | GASKET EPDM 162X10X4 |
| '0750-106984 | NOVELLUS | GASKET EPDM 325X10X4 ELEC/PNEU CABNT |
| '0770-103888 | NOVELLUS | WELDMENT,SHAFT,SPINDLE |
| '0770-104380 | NOVELLUS | GASKET FOR CARRIER/CUTTER ARM |
| '0800-102218B | NOVELLUS | BLOCK 472, FRONT STOP WET UNLOAD CASS |
| '0850-103029 | NOVELLUS | ACTUATOR 472 UNLOAD CASS SENSOR L SIDE |
| '0860-103461 | NOVELLUS | SHOE,CASS LOAD STAT SHUTTLE SENSOR |
| '10-00060-00 | NOVELLUS | TUBING, HEAT SHRNK, 1/4 TO 1/8 BL (1 FT) |
| '10-00162-00 | NOVELLUS | WLDMNT FITTING |
| '10-00285-02 | NOVELLUS | TUBE-LONG SHWR COOL |
| '10-029864-00 | NOVELLUS | ASSY,NOZZLE |
| '10-047980-00 | NOVELLUS | SLOW PUMP,(SP) TO FORELINE |
| '10-126181-00 | NOVELLUS | TUBE ASSY,ISO TO THRTL VLV,SPD |
| '10-155417-00 | NOVELLUS | WELDMENT,VALVE,MVCR-K FLANGE |
| '1450-107496 | NOVELLUS | STUD,UPPER LOAD CELL 472 |
| '14738-01 | NOVELLUS | BUBBLER,QUARTZ |
| '15-00529-00 | NOVELLUS | BRACKET, BRAKE |
| '15-00534-00 | NOVELLUS | FLANGE, BRAKE |
| '15-00553-25 | NOVELLUS | SHIM,HEATER .025 |
| '15-00554-05 | NOVELLUS | SHIM, V .005 |
| '15-00578-00 | NOVELLUS | SLEEVE, FLANGED, AC FEEDTHRU, CERAMIC |
| '15-00638-00 | NOVELLUS | PULLEY-ROTATION DRIVE / WTM |
| '15-00661-00 | NOVELLUS | SPACER |
| '15-00685-00 | NOVELLUS | FEEDTHRU,INNER |
| '15-00686-00 | NOVELLUS | FEEDTHRU WASHERS |
| '15-00706-00 | NOVELLUS | PISTON |
| '15-00779-00 | NOVELLUS | SHAFT, LIFT, WCVD |
| '15-00835-00 | NOVELLUS | PLATFORM - LIFT PIN WCVD |
| '15-00882-00 | NOVELLUS | HARD STOP, OUT |
| '15-00975-00 | NOVELLUS | LIFT PIN LOAD STATION |
| '15-01050-02 | NOVELLUS | SHIMS, PADDLE, 0.002"THK |
| '15-028766-00 | NOVELLUS | RING, GUARD, 200MM |
| '15-029856-00 | NOVELLUS | EVAPORATOR BODY, CVD TIN |
| '15-032014-01 | NOVELLUS | WINDOW,ETCH RESISTANT,FUSED SI |
| '15-032185-00 | NOVELLUS | PIN,CENTERING |
| '15-032631-00 | NOVELLUS | FLANGE,SPINDLE |
| '15-033874-00PLUG | NOVELLUS | CAP 15-033874-00(PLUG INJET MANIF) |
| '15-034849-00 | NOVELLUS | RETAINER, SEAL |
| '15-038324-00 | NOVELLUS | SHIELD PESTAL LEAD WIRE |
| '15-042148-00 | NOVELLUS | PLENUM, PURGE, TOP |
| '15-042154-00 | NOVELLUS | RING, CERAMIC, SHHD, 9.68 X 9.06 X .25 |
| '15-042159-00 | NOVELLUS | TUBE, CERAMIC |
| '15-042177-00 | NOVELLUS | HOUSING,BEARING,SPINDLE,TIN |
| '15-042256-00 | NOVELLUS | FINGER, FORK, CERAMIC, LOW CONTACT |
| '15-042270-00 | NOVELLUS | SCREEN, RF SHIELD, ETCHED |
| '15-042341-00 | NOVELLUS | FLANGE |
| '15-052457-00 | NOVELLUS | PLATE BLANK -OFF |
| '15-055721-00 | NOVELLUS | BUSHING,SPLIT |
| '15-100263-00 | NOVELLUS | ROBOT BLADE 200MM HI PURI |
| '15-103651-00 | NOVELLUS | RING GUARD |
| '15-10667-00 | NOVELLUS | RING, EXCLUSION |
| '15-108330-00 | NOVELLUS | SPRING,PED,CER,D 3,WCVD |
| '15-111482-00 | NOVELLUS | WINDOW, SAPPHIRE, CVD TIN |
| '15-111483-00 | NOVELLUS | FRAME, VIEWPORT, SPACER, CVD TIN |
| '15-147213 | NOVELLUS | BRACKET SHELF PEC ALIGNER |
| '15-275673-00 | NOVELLUS | COVER VIEW PORT WINDOW COVE |
| '15-324541-00 | NOVELLUS | SPINDLE AL |
| '15366-01 | NOVELLUS | CHAMBER LIFTER TRIPOD GASONICS |
| '15367-01 | NOVELLUS | PIN,LIFT,QUARTZ |
| '15380-01 | NOVELLUS | INSULATOR, PLATEN - PEP 3510 / NOVELLUS |
| '15884-02 | NOVELLUS | DETECTOR,PWA EOP |
| '16-028260-00 | NOVELLUS | WELMENT ATTACHMENT |
| '16-029342-00 | NOVELLUS | PANEL LOC 2 DLCM-S |
| '16-029845-00 | NOVELLUS | DISTRIBUTOR TOP |
| '16-029846-00 | NOVELLUS | DISTRIBUTOR BOTTOM |
| '16-029857-00 | NOVELLUS | EVAPORATOR TOP |
| '16-032558-00 | NOVELLUS | PLATE, MTG, PED, D, STA#2-5 |
| '16-033931-00 | NOVELLUS | SHOWER HD PINNED 200,WLDMNT |
| '16-1007 | NOVELLUS | SCREW, SHLDR, HEX SCH, 0.125DIA X 0.250L |
| '16065-01 | NOVELLUS | HARNESS ASSY, LIFT SENSOR |
| '16337-01 | NOVELLUS | COLLAR,QUARTZ,1.25"HOLE |
| '16531-01 | NOVELLUS | ROD,DIFFUSER LAMP,QUARTZ 16531-01 |
| '16532-01 | NOVELLUS | PLATE,LAMP,QUARTZ |
| '16970-01 | NOVELLUS | WAFER SENSOR ASSEMBLY |
| '17-00094-00 | NOVELLUS | STRAP RF |
| '17-00175-00 | NOVELLUS | CERAMIC FORK FIXTURE CLAMP |
| '17-0247 | NOVELLUS | STAND-OFF, 1/2 INCH 6X32 |
| '17-027150-00 | NOVELLUS | BRACKET (REV-B) |
| '17-048012-00 | NOVELLUS | BRACKET RF CABLE |
| '17-051299-00 | NOVELLUS | CLIP HEATER |
| '17-2725 | NOVELLUS | SPRING,CHAMBER DOOR |
| '17-2730 | NOVELLUS | SPRING, WASHER (LAMP TRAY ASSY) |
| '17-2747 | NOVELLUS | 8OWEL PIN, 0.125 DIAMETER |
| '17622-01 | NOVELLUS | PLATE, LAMP DIFFUSER, QUARTZ,4.0" |
| '176504 | NOVELLUS | 04-2383 TUBE PLASMA CERAMIC |
| '19-00161-00 | NOVELLUS | MOTOR-EXT W/DRIVER |
| '19-00255-00 | NOVELLUS | TUBING-16 OD SS TEOS PUMP |
| '19-155970-00 | NOVELLUS | TUBE,ASSY,VLV,PNEU,NC,FVC |
| '19-2652 | NOVELLUS | NYLON BUSHING FOR GASONICS ASHER DOOR |
| '20-00126-00 | NOVELLUS | BELT TIMING .4WX2.25OD 20-00126-00 |
| '20-00304-00 | NOVELLUS | DRIVE - ROBOT ROTATION |
| '20-1154 | NOVELLUS | FILTER,WAFERGARD,60 SLPM 5RA 20-1154 |
| '20-8031 | NOVELLUS | ORIFICE,BOTTOM,CERAMIC,.852X.3121X.04THK |
| '20-8032 | NOVELLUS | ORIFICE,TOP,CERAMIC, .95X.3121X.04THK |
| '21-00057-00 | NOVELLUS | SCREW, 1/4-201/4 LG SKTHD |
| '21-042023-09 | NOVELLUS | WASHER, FLAT, 1/4 SST |
| '21-10074-00 | NOVELLUS | SCRW,SKT,HEX,8-32x.375,SS,V |
| '2100-105730 | NOVELLUS | TOOL,SPRAYGUN REPAIR |
| '2103-0051 | NOVELLUS | SENSOR-TEOS COV CABLE |
| '22-00166-00 | NOVELLUS | REDUCER-NW40 TO NW50 SST |
| '22-00650-00 | NOVELLUS | NUT-QUICK SEAL 3/16 TUBE |
| '22-00651-00 | NOVELLUS | WASHER-QUICK SEAL 5/16 TUBE |
| '22-00658-00 | NOVELLUS | O-RING, 7.45IDX275W, KALREZ |
| '22-00716-00 | NOVELLUS | O-RING (AS568AK#231)COMPOUND:4079 |
| '22-00736-00 | NOVELLUS | FILTER,WAFERGUARD UPPER MANIFOLD B |
| '22-0075-009 | NOVELLUS | PCB, D/A CONVERTER GESPAC |
| '22-034149-00 | NOVELLUS | O-RING, KALREZ 4079 SIZE 2-242 |
| '22-043763-00 | NOVELLUS | FILTER, WAFERGARD II NF MINI |
| '22-123219-00 | NOVELLUS | GASKET,L-TYPE ACT SHAFT,SMC |
| '22-153737-00 | NOVELLUS | MFC, 20SLM, N2, UNIT 8100 |
| '22-2682 | NOVELLUS | VALVE,ISOLATION,NUPRO |
| '22-2734 | NOVELLUS | SOLENOID, SINGLE, GAS BOX |
| '22-2816 | NOVELLUS | VALVE VALVE SLIT ROLL CAM GATE |
| '23-2644 | NOVELLUS | ASSEMBLY,BARATRON,NEW STYLE |
| '23-2919 | NOVELLUS | TRANSDUCER-PRESSURE TYPE 622AA |
| '26-8872-200 | NOVELLUS | KIT-RETRO FIT TIMING BELT |
| '27-00135-00 | NOVELLUS | CONTROLLER-TEMP EUROTHERM |
| '27-00141-00 | NOVELLUS | CONTROLLER, ADAPTOR, AC 4S02 |
| '27-00152-00 | NOVELLUS | PCB, LOWER, BREAKOUT |
| '27-032653-00 | NOVELLUS | TRAZAR MATCH 5KW W/ARC SENSOR |
| '27-049632-00 | NOVELLUS | HEATER, 50W, 1 X 5 |
| '27-052211-00 | NOVELLUS | RF MATCH |
| '27-10053-00POWE | NOVELLUS | POWER SUPPLY 27-10053-00(POWER SUPPLY +- |
| '27-112782-00 | NOVELLUS | GAS DETECTOR DUAL HEAD ENDP |
| '27-118913-00 | NOVELLUS | ARCNET CARD |
| '27-119503-00 | NOVELLUS | PCB,TYPE "J" OVERTEMP |
| '27-126670-00 | NOVELLUS | HEATER,MKS,TVLV,SEQ-X |
| '27-132575-00 | NOVELLUS | DISPLAY,12",FLT PNL,SIDE,MNT,U |
| '27-277312-00 | NOVELLUS | PCB ASSY J OVERTEMP EXPRESS |
| '2805-102212 | NOVELLUS | ASSY,SHUTTLE FORCE |
| '2805-103420 | NOVELLUS | ASSY, SLURRY FEED PRIMARY BELOW TBL |
| '2805-103421 | NOVELLUS | ASSY, SLURRY FEED FINAL BELOW TBL |
| '2805-103645 | NOVELLUS | SHUTTLE,BEVELED 200MM |
| '2805-103683 | NOVELLUS | 472 UNLOAD SHOE |
| '2805-104071 | NOVELLUS | ASSY,DRAIN VALVE UNLOAD 2805-10471 |
| '2805-737738C | NOVELLUS | ASSEMBLY PAD BACKING RIVETED |
| '2808-106043 | NOVELLUS | ASSY, PRINTER CIRCUIT UNIVERSAL HX |
| '2808-107088 | NOVELLUS | PCA, KEYBOARD, ENCODER INTERFACE PCB 7 |
| '2850-105731 | NOVELLUS | REPAIR KIT, SPRAY GUN |
| '34-00022-00 | NOVELLUS | RELAY, SOLID STATE 25A, D1 225 |
| '34-00121-00 | NOVELLUS | SWITCH-INTERLOCK |
| '34-00133-00 | NOVELLUS | SEALANT TEFLON |
| '34-10222-00 | NOVELLUS | SWITCH,6GPM WATER FL W/RELAYS |
| '35-10004-01 | NOVELLUS | WIRE, BRN 18AWG STND (8 FT) |
| '35-10004-02 | NOVELLUS | WIRE, RED 18AWG STND (4 FT) |
| '35-10004-07 | NOVELLUS | WIRE, VIO 18AWG STND (4FT) |
| '372-15001-1 | NOVELLUS | ASSY,LOAD CUP-200MM |
| '372-15002-1 | NOVELLUS | CUP,LOAD 200MM |
| '372-15003-1 | NOVELLUS | PALET, WAFER LIFT |
| '372-15004-1 | NOVELLUS | CLIP,SENSOR LOAD CUP |
| '372-15005-1 | NOVELLUS | PIN-CENTERING 372-15005-1 |
| '372-15022-1 | NOVELLUS | 472, SHUTTLE ASSY. LH SLIDE STANDOFF |
| '372-15023-1 | NOVELLUS | 472 SHUTTLE ASSY. RH SLIDE, STANDOFF |
| '372-15050-1 | NOVELLUS | ASSY, THRU BEAM SENSOR |
| '372-15082-1 | NOVELLUS | GASKET, P WATER SEAL |
| '372-15501-1 | NOVELLUS | PLATE,COUPLING-DOJEN(EIP-P0040) |
| '372-15502-1 | NOVELLUS | COUPLING,SHAFT(EIP-P0041) |
| '372-15503-1 | NOVELLUS | BRACKET,ROLLER SWITCH P/ARM DRIVE |
| '372-15801-1 | NOVELLUS | ASSY,WATER TRAP, VACUUM |
| '372-15802-1 | NOVELLUS | 472, VACUUM, WATER TRAP (EIP-P0057) |
| '372-15936-1 | NOVELLUS | SCREEN,SAFETY CASCADE TUB |
| '372-36389-1 | NOVELLUS | INTERFACE,PORT,C/A COM1 SECS |
| '372-36504-1 | NOVELLUS | PWB,KEYPAD INTERFACE BD. PBC7 |
| '372-45020-1 | NOVELLUS | CARRIER-FLOATING DRIVE RING |
| '372-45164-1 | NOVELLUS | BASE,CARRIER,200/32FLAT |
| '372-45179 | NOVELLUS | CARRIER DRIVE RING (+BAR) |
| '372-55135-1 | NOVELLUS | ALIGNMENT PIN,WAFER LIFT |
| '372-68389-1 | NOVELLUS | BELLOW-BOOT-CASCADE TUBRINSE 372-68389-1 |
| '372-72001-1 | NOVELLUS | 472, CARRER ROTATION SHAFT COUPLER |
| '372-72133-1 | NOVELLUS | KEY-SHAFT CARRIER ROTATE MOTOR |
| '372-72159-1 | NOVELLUS | INSERT SAFETY,CAM FINAL |
| '372-72241 | NOVELLUS | HOSE FLEXADUC PVC 2 2.5" (#0414084) |
| '372-72260-1 | NOVELLUS | SPLINE, ROLLER BRG. |
| '372-72263-1 | NOVELLUS | 472,CARRIER DRIVE,CARTRIDGE, BRG SPINDLE |
| '372-72264-1 | NOVELLUS | DRIVER,REDUCER SPINDLE |
| '372-72265-1 | NOVELLUS | DRIVER,SPINDLE |
| '372-72266-1 | NOVELLUS | CLAMP,TUBE SPINDLE |
| '372-72267-2 | NOVELLUS | COVER,CARRIER PVDF |
| '372-72268-1 | NOVELLUS | 472, CARRIER DRIVE, SPACER, PRELOAD BRG |
| '372-72269-1 | NOVELLUS | NUT,HEX |
| '372-72301-1 | NOVELLUS | COVER,COUNTERWEIGHT |
| '372-72361-1 | NOVELLUS | SHAFT, CARRIER DRIVE |
| '372-72496-1 | NOVELLUS | EYE,ARM PIVOT LOAD CELL |
| '372-72564-2 | NOVELLUS | BLOCK,V-NOTCH,POLISH ARM |
| '372-76066-1 | NOVELLUS | STUD,PLATEN CLAMP |
| '372-76068-1 | NOVELLUS | WASHER SPACER, PLATEN CLAMP |
| '372-76113-1 | NOVELLUS | SILICONE 472 TUBING, SPINDLE SHAFT |
| '372-76135-1 | NOVELLUS | SEAL,BUSHING |
| '372M-29011-1 | NOVELLUS | 472,SLURRY DISPENSE TUBE,FINAL |
| '372M-29012-1 | NOVELLUS | MOUNT,SLURRY TUBES |
| '372M-35119-51 | NOVELLUS | MOD, 110V PWR XFMR (RH040095) |
| '372M-36261-1 | NOVELLUS | DRIVER,C/A OPTO TO RAIL#0 |
| '372M-36264-1 | NOVELLUS | DRIVER,C/A OPTO DRIVER TO RAIL #3 |
| '372M-36266-1 | NOVELLUS | DRIVER,C/A OPTO DRIVER TO RAIL #5 |
| '372M-36274-1 | NOVELLUS | VIDEO DRIVE,AUX.BOARD,C/A TO CARD CAGE |
| '372M-36297 | NOVELLUS | BOARD,NOISE SUPPRESSION |
| '372M-36374 | NOVELLUS | ASSY,AUX CONTROL CONSOLE PWB |
| '372M-37051-1 | NOVELLUS | ASSY, BRAIN BOARD ANALOG RAIL 0 |
| '372M-37053-1 | NOVELLUS | ASSY,BRAIN BOARD ANALOG RAIL #1 |
| '372M-37056-1 | NOVELLUS | ASSY,DIGITAL I/O RAIL NUM. 3 |
| '372M-37059-1 | NOVELLUS | ASSY, BRAIN BD DIGITAL RAIL#4 372M-37059 |
| '372M-44113-1 | NOVELLUS | ASSY, CLEAN STA LEVEL SENSOR |
| '372M-44114-1 | NOVELLUS | TUBE,LEVEL SENSOR, CLEAN ST 372M-44114-1 |
| '372M-44115-1 | NOVELLUS | COUPLING,LEVEL SENSOR, CLEAN STA. |
| '372M-44116-1 | NOVELLUS | CONNECTOR,LEVEL SENSOR, CLEAN STA. |
| '372M-72120-1 | NOVELLUS | SEAL,MAIN SHAFT |
| '38-00049-00 | NOVELLUS | CABLE, 18AWG 3 COND (7 FT) |
| '38-0182 | NOVELLUS | CONTACTOR, 3P, 80AMP, 24V - GASONIC |
| '38-2709 | NOVELLUS | CONTACTOR, 120VAC,30 AMP, 4 POLES |
| '39-00087-00 | NOVELLUS | ADAPTOR PANEL MOUNT 10 AIR |
| '39-3002 | NOVELLUS | LAMP, PILOT LIGHT,ROUND FLUSH,GREEN, 24V |
| '39-3004 | NOVELLUS | LAMP, INCAND, 24V |
| '3910-103771 | NOVELLUS | 472, FILTER REPLACEMENT 30 UM |
| '40-0021 | NOVELLUS | FUSE, 500V, 2.5 TIME DELAY |
| '40-0059 | NOVELLUS | FUSE, 5 AMP SLOW BLOW. 3AG, 250V |
| '40-2370 | NOVELLUS | LED, GRN 5VDC W/GREEN LENS |
| '4100-100GF02B06AP1P2 | NOVELLUS | BEARING BALL,.250 ID,NEW STYLE SCRUB |
| '472-17069 | NOVELLUS | ASSY,DRAIN VALVE CASCADE TUB UNLOAD |
| '472-17329 | NOVELLUS | C/A,PL407,ARM POSITION SENSOR |
| '472-17361 | NOVELLUS | C/A (PL1 - PL45) |
| '472-17391 | NOVELLUS | C/A,PL28 TO TB73/TB74 LOAD/UNLOAD |
| '472-17408 | NOVELLUS | C/A,PL343 TO TB72 LOAD/UNLOAD |
| '472-17409 | NOVELLUS | C/A, UNLOAD ELEVATOR MTR, IPEC 472 |
| '472-17513 | NOVELLUS | GEAR,DRIVE ARM POSITION SENSOR |
| '472-17614 | NOVELLUS | 472,SLURRY DISPENSE TUBE,PRIMARY |
| '472-17668 | NOVELLUS | TUBE,SPRAY MOUNT (INTERPLATEN RINSE) |
| '57-2456 | NOVELLUS | PANCAKE CYLINDER - COOL. STA. / GASONICS |
| '57-2457 | NOVELLUS | DOOR CYLINDER,GASONICS |
| '60-00026-00 | NOVELLUS | RING CENTERING |
| '60-00212-00 | NOVELLUS | GAUGE-VACUUM |
| '60-042217-00 | NOVELLUS | AIR CYLINDER |
| '60-10068-00 | NOVELLUS | CLAMPS |
| '60-10312-00 | NOVELLUS | GATE VAT 78510-R1 46X236 |
| '60-2032 | NOVELLUS | DUMMY LOAD W/COUPLER WR284, PEP+ / NVLS |
| '60-2033 | NOVELLUS | WAVEGUIDE CIRCULATOR WR284, PEP+ / NVLS |
| '60-2043 | NOVELLUS | MAG ZKW |
| '60-268956-00 | NOVELLUS | NOVELLUS NEW STYLE DOOR CYLINDER |
| '61-2308 | NOVELLUS | CLUSTER CNTRL,P/S +5VDC,+-15VDC,115VAC |
| '61-2344 | NOVELLUS | BATTERY BR9401882-A (ROBOT) / GASONICS |
| '61-2345 | NOVELLUS | BATTERY ER6VC3 (CONTROLLER) / GASONICS |
| '71311-01 | NOVELLUS | LAMP, TI 3/4 SUBMINI 28V |
| '71329-31 | NOVELLUS | FUSE, TIME DELAY 10A 500V VPPCM |
| '71662-08 | NOVELLUS | SCREW 4-40, VENT (INSULATOR) / NOVELLUS |
| '71966-02 | NOVELLUS | THOMAS CLAMP,28/15 |
| '71966-06 | NOVELLUS | THOMAS CLAMP,35/25 |
| '72925-01 | NOVELLUS | CONNECTOR,PNUEMATIC LINE BULKHD,GAS BOX |
| '73326-01 | NOVELLUS | 00LAMP SOCKET HOUSING GASONICS |
| '73337-01 | NOVELLUS | GASKET, FLANGE, LIFT ASSY, VITON |
| '73495-01 | NOVELLUS | RECT, SCR, AC, S2-4, SCR1 - GASONICS |
| '73732-02 | NOVELLUS | SWITCH, AIRFLOW GASONICS |
| '74-00102-00 | NOVELLUS | PEDESTAL |
| '76-0005-001 | NOVELLUS | GENERATOR, MEGASONICS TRANSDUCER FINE JET |
| '77-2002 | NOVELLUS | GREASE CG2 (LGU) / YASKAWA-GASONICS |
| '77-2003 | NOVELLUS | GREASE 4B NO. 2 / YASKAWA-GASONICS |
| '90-1080 | NOVELLUS | PCB ASSY, LAMP FAILURE DETECTION |
| '90-2737 | NOVELLUS | REV.A PWA I/O JUNCTION W/JP3 CON |
| '93-2657 | NOVELLUS | LAMP HG-OZONE FREE 2.125"12"CORD 93-2657 |
| '93-2681 | NOVELLUS | WATER FLOW SENSOR, W CABLE ASSY |
| '93-2696 | NOVELLUS | ATM SENSOR, 0-15PSIA / GASONICS |
| '93-3036 | NOVELLUS | LINEAR LIFT, PROCESS CHAMBER |
| '930051 | NOVELLUS | WASHER,FLAT,M6 |
| '930060 | NOVELLUS | WASHER,LOCK,M4 |
| '930062 | NOVELLUS | WASHER,LOCK,M6 |
| '931005-61 | NOVELLUS | SCREW,CAP,SOC HD,SST,(M6X22) |
| '931023-7 | NOVELLUS | AURIGA, MHTA PANEL THUMB SCREWS |
| '94-1112 | NOVELLUS | WAVEGUIDE W/ 3 TUNING SLUGS |
| '94-1150 | NOVELLUS | VALVE, THROTTLE EXHAUST, MKS 653A |
| '94-2767 | NOVELLUS | HUB- NETWORK ( BLACK BOX ) / GASONICS |
| '94-3120 | NOVELLUS | DISPLAY,15 IN,PNL MOUNT - GASONICS |
| '94-3175 | NOVELLUS | YASAKWA ROBOT WAFER PUSHER FOR ASHERS |
| '94-3418 | NOVELLUS | SINGLE PIECE YASKAWA ROBOT END-EFFECTOR |
| '95-2971 | NOVELLUS | SENSOR ASSEMBLY PINS DOWN / GASONICS |
| '95-2972 | NOVELLUS | SENSOR ASSEMBLY PINS UP / GASONIC |
| '95-3082 | NOVELLUS | GAS-NEW STYLE CYLINDER DOORSENSOR CLOSED |
| '95-3083 | NOVELLUS | GAS NEW STYLE DOOR CYLINDER SENSOR OPEN |
| '95-3628 | NOVELLUS | RS232 INTERFACE (DIGI BD) |
| '950023 | NOVELLUS | IDLER PULLEY ASSEMBLY |
| '950043 | NOVELLUS | BRUSH, ADHESIVE |
| '950179 | NOVELLUS | AURIGA, PAD COND. GIMBLE BEARING |
| '950180 | NOVELLUS | ADAPTER PLATE,PAD CONDITIONER |
| '950595-R | NOVELLUS | AURIGA, REBUILT EQUIPE ROBOT CONTROLLER |
| '950607 | NOVELLUS | AURIGA,USA2-22-35 AMP,7 AMP 2,MAIN FRAME |
| '950610 | NOVELLUS | AURIGA,MOTOR SERVO,MHTA ARM OSCILLATION |
| '950615 | NOVELLUS | AURIGA,TRANSFER PADDLE,AND UNLOAD ELEV |
| '950616 | NOVELLUS | AURIGA,MOTOR,GEARHEAD,INDEX TABLE DRIVE |
| '950623 | NOVELLUS | BASE M10 10 SLOT |
| '950624 | NOVELLUS | BASE, 5SLOT, 120VAC, P/S |
| '950625 | NOVELLUS | MODULE, INPUT, ANALOG VOLTAGE |
| '950626 | NOVELLUS | OUTPUT ANALOG VOLTAGE |
| '950629 | NOVELLUS | OUTPUT MOD 24V, 12, 32, POS |
| '950630 | NOVELLUS | 24V POWER SUPPLY |
| '950669 | NOVELLUS | AURIGA, MHTA DRIVE BELT |
| '950673 | NOVELLUS | PLATE SLIDE MONT,TOL-0-MATIC |
| '950677 | NOVELLUS | AURIGA, TRANSFER PADDLE BELT |
| '950680 | NOVELLUS | AURIGA,TOL-O-MATIC,TRANSFER PADDLE DRIVE |
| '950727 | NOVELLUS | ASSY,MOTOR SERVO,FINAL TABLE |
| '950741 | NOVELLUS | BELT, TIMING, T-10X98 TEETH,INDEX TABLE |
| '950777 | NOVELLUS | AURIGA VAC/PRESSURE TRANSDCR,POLISH ARM |
| '950827 | NOVELLUS | ASSY,DRIVE,INDEX |
| '950928 | NOVELLUS | SIDE INTERLOCK ACTUATOR |
| '950929 | NOVELLUS | ACTUATOR, INTERLOCK, FRONT |
| '950972 | NOVELLUS | INPUT MODULE 24V,32PT |
| '950973 | NOVELLUS | OUTPUT ANALOG CURRENT |
| '950975 | NOVELLUS | MIO,TBI-16-800 |
| '951008** | NOVELLUS | BELT, TIMING, XL1/5PD, 95 GRO |
| '951017 | NOVELLUS | 008100 PSI AIR REG |
| '951057 | NOVELLUS | TERMINAL FUSE HOLDER BLOCK |
| '951287 | NOVELLUS | CYLINDER,AIR |
| '951289 | NOVELLUS | AURIGA PROCESS DOOR SWITCH |
| '951291 | NOVELLUS | AURIGA, PROCESS DOOR SW ACTUATOR,ROLLER |
| '951313** | NOVELLUS | BUSHING, SHOULDER, 6 IDX80DX10 |
| '951354 | NOVELLUS | FUSE,MDA-1 |
| '951355 | NOVELLUS | FUSE |
| '951365 | NOVELLUS | GREEN PUSH BUTTON SWITCH |
| '951366 | NOVELLUS | SUPRESSOR,SURGE |
| '951380 | NOVELLUS | FUSE,3AMP |
| '951390 | NOVELLUS | AURIGA, LOAD STATION TILT MOTOR |
| '951396 | NOVELLUS | AURIGA AUTO AND MAIN FRAME MACE VALVES |
| '951399 | NOVELLUS | FUSE,MDA-2 |
| '951400 | NOVELLUS | FUSE,MDA-4 |
| '951401 | NOVELLUS | FUSE,MDA-5 |
| '951403 | NOVELLUS | FUSE |
| '951406 | NOVELLUS | FUSE,FNQ-3 |
| '951407 | NOVELLUS | AURIGA, FUSE, FNQ-20 |
| '951473 | NOVELLUS | AURIGA VACUUM GENERATOR CMP 13 |
| '951474 | NOVELLUS | AURIGA, AUTO FRAME, X-FER PADDLE MOTOR C |
| '951475 | NOVELLUS | AURIGA, AUTO F.UNLOAD FLIPPER, MOTOR CAB |
| '951476 | NOVELLUS | AURIGA, AUTO F. ELEV. A MOTOR CABLE |
| '951477 | NOVELLUS | AURIGA, AUTO F. ELEV. B MOTOR CABLE |
| '951478 | NOVELLUS | 2 AMP 3M2 |
| '951480 | NOVELLUS | AURIGA, AUTO F., LOAD FLIPPER MOTOR CABL |
| '951481 | NOVELLUS | AURIGA, AUTO F., TILT B, MOTOR CABLE |
| '951484 | NOVELLUS | AURIGA, CABLE, MHTA, ROTATION, ARM 5 |
| '951593 | NOVELLUS | CABLE |
| '951594 | NOVELLUS | CABLE 951594 |
| '951598 | NOVELLUS | ASSY CABLE AMP |
| '951602 | NOVELLUS | TRACK A WAFER IN THE MIDDLE |
| '951607 | NOVELLUS | ELEVATOR CASS A PRESENT |
| '951608 | NOVELLUS | ELEVATOR CASS B PRESENT RIGHT |
| '951609 | NOVELLUS | ELEVATOR B CASSETTE PRESENT |
| '951655 | NOVELLUS | CABLE BLACK |
| '951657 | NOVELLUS | 4 P6 BLACK CABLE |
| '951658 | NOVELLUS | RIGHT HAND SPLASH GUARD |
| '951659 | NOVELLUS | LEFT HAND SPLASH GUARD |
| '951662 | NOVELLUS | AURIGA SCRUBBER, HOME AND SCRUB SENSOR |
| '951683 | NOVELLUS | AURIGA, WAFER LOSS SENSOR |
| '951696 | NOVELLUS | 0-30 PSI EP TRANSDUCER |
| '951712 | NOVELLUS | AURIGA,19 AMP CONTACTOR,(DRIVE PWR CONTR |
| '951741 | NOVELLUS | FUSE |
| '951788** | NOVELLUS | FILTER,COALESCER ELEMENT |
| '951814 | NOVELLUS | RELAY,3POLE,24VDC COIL |
| '951819 | NOVELLUS | JUMPER, 10 POLE |
| '951837 | NOVELLUS | BASE M10 5 SLOT |
| '951844 | NOVELLUS | AURIGA, MIO, 24VDC POWER SUPPLY |
| '952221 | NOVELLUS | SHIM,MYLAR,(AMBER)25UM |
| '952225 | NOVELLUS | SHIM,MYLAR,(YELLOW)500UM |
| '952314 | NOVELLUS | AURIGA, MAIN POLISH PLATEN SPINDLE UNIT |
| '952570 | NOVELLUS | IONIZER |
| '952865 | NOVELLUS | AURIGA, SLURRY RIBBON TUBING, 952865 |
| '952880 | NOVELLUS | RETAINER,WAFER SEAL |
| '952941 | NOVELLUS | AURIGA, CARRIER PLATE FILMS |
| '953091 | NOVELLUS | AURIGA, WAY COVER SPRING, LEFT SIDE |
| '953092 | NOVELLUS | AURIGA, WAY COVER SPRINGS, RIGHT SIDE |
| '953381 | NOVELLUS | FLIPPER BOX ARM'S |
| '953395 | NOVELLUS | MACE VALVE,8 STATION |
| '953407 | NOVELLUS | AURIGA TRANSFER PADDLE TO WATER TRACK SH |
| '953697 | NOVELLUS | COVER,FRONT,MAIN LINER |
| '953698 | NOVELLUS | COVER, CENTER, MAIN, LINER |
| '953699 | NOVELLUS | COVER,REAR MAIN LINER |
| '953700 | NOVELLUS | COVER,POSITION,MAIN LINER 953700 |
| '953936 | NOVELLUS | ASSY TBI 16PT |
| '956094 | NOVELLUS | AURIGA, MAIN POLISH, FAN MOTOR CONTACTOR |
| '956096 | NOVELLUS | AURIGA,MAIN POLISH,FAN MOTR OVERLD RELAY |
| '956305 | NOVELLUS | AURIGA,VACUUM TANK,CHECK VALVE, 1/2 FNPT |
| '957069 | NOVELLUS | POWER SUPPLY AURIGA +/- 15VDC |
| '957308 | NOVELLUS | IONIZER CONTROL |
| '957455 | NOVELLUS | AURIGA, MAIN POLISH MOTOR ENCODER |
| '958412 | NOVELLUS | CABLE 958412 |
| '958682-A | NOVELLUS | CABLE 958682-A |
| '958683 | NOVELLUS | CABLE 958683 |
| '958934 | NOVELLUS | KIT,SERVICE MONITOR,EVC |
| '958948 | NOVELLUS | KEYBOARD, TIP NEMA 4 |
| '959336 | NOVELLUS | FUSE,LPJ-70SP |
| '959348 | NOVELLUS | AURIGA PROCESS DOOR ROLLER |
| '959412 | NOVELLUS | END POINT SCREEN |
| '96-2619 | NOVELLUS | CABLE ASSY, LAMP SENSOR / NOVELLUS |
| '96-2661 | NOVELLUS | CLUSTER MINI-CONTROLLER SOLENOID BANK |
| '96-3887 | NOVELLUS | CABLE CABLE ASSY BLADE HOME TO B |
| '960491 | NOVELLUS | END POINT COMPUTER |
| '960815 | NOVELLUS | AURIGA GEARHEAD,POLISHER ARM,TEKLINE |
| '961061 | NOVELLUS | SUPPLY UNINTERRUPTED POWER |
| '962691 | NOVELLUS | AURIGA DISC ATI S3410071 10IN |
| '964071 | NOVELLUS | HOLDER,MOTOR BRUSH,SLURRY PUMP |
| '964570 | NOVELLUS | SWITCH,ROCKER (OLD P/N PK010045) |
| '965406 | NOVELLUS | SHAFT, GUIDE, LOWER |
| '965513-R | NOVELLUS | AURIGA, VACUUM PUMP REBUILD KIT. |
| '966158 | NOVELLUS | AURIGA, FLIPPER BOX BELT |
| '966672 | NOVELLUS | AURIGA, SCRUBBER, BEARING, BALL, 6MM ID |
| '966678 | NOVELLUS | AURIGA, SCRUBBER, SEAL LIP |
| '966735 | NOVELLUS | AURIGA, SCRUBBER, BRUSH PULLEY |
| 'A95-216-01 | NOVELLUS | LOADLOCK ASSY, FLOW SWITCH (GASONIC) |
| 'AA2076A1 | NOVELLUS | SCRUBBER PEDESTAL |
| 'AA2123A1 | NOVELLUS | AURIGA, CARRIER QUICK COUPLER |
| 'AC2026A1 | NOVELLUS | BEARING,TAPERED ROLLER |
| 'AC2027A1 | NOVELLUS | SEAL,CARRIER ARM OSCILLATION |
| 'AC2048A1 | NOVELLUS | TUBING,SLURRY PUMP(25'ROLLS) |
| 'AC2106A1 | NOVELLUS | AURIGA, MAIN POLISH PLATEN DRIVE BELTS |
| 'AC2113A1 | NOVELLUS | AURIGA, BELLOWS/BOOT,QUICK COUPLER |
| 'AC21170B1 | NOVELLUS | CARRIER CABLE |
| 'AC2118A1 | NOVELLUS | BEARING, CROSS ROLLER,PAD CONDITIONER |
| 'AC2128A1 | NOVELLUS | AURIGA, PAD COND. LOAD CELL AMP |
| 'AC2185A1 | NOVELLUS | LIGHT TOWER |
| 'AC2187B1 | NOVELLUS | BRACKET,MOUNTING,CABLE CARRIER |
| 'AC2199A1 | NOVELLUS | RING,WIPER,PUR |
| 'AC2204A! | NOVELLUS | AURIGA ELEVATOR, TEFLON SEALS |
| 'AC2213A1 | NOVELLUS | FLOAT SWITCH |
| 'AC2248A1 | NOVELLUS | TUBING,PUR,1/4 O |
| 'AC2281A1 | NOVELLUS | SWITCH, PRESSURE, 1/8NPT |
| 'AC2360A1 | NOVELLUS | SPRING, EXT, STL,. 188ODX1.5L |
| 'AC2376A1 | NOVELLUS | NOZZLE, FLARE, PVC, 1/4" |
| 'AC2377A1 | NOVELLUS | NOZZLE, 90DEG, ADJ, 1/8" ORIFIC. |
| 'AC2379A1 | NOVELLUS | ELEMENT, EXTENDED, 1/4" ID X 3 |
| 'AC2380A1 | NOVELLUS | CLAMP, ELEMENT, 1/4" ID |
| 'AC2381A1 | NOVELLUS | VALVE, IN-LINE, 1/4" ID |
| 'AC2382A1 | NOVELLUS | SEGMENT,ADJUSTABLE(2PCS=ONEPART) |
| 'AC2483A1** | NOVELLUS | AURIGA LOAD/UNLOAD CUP SPRING 30ODX.625L |
| 'AC2574A1 | NOVELLUS | SCREW THUMB M8 UNLOAD MODULE |
| 'AC2628A1 | NOVELLUS | AURIGA, TRANSFER PADDLE LIFT CYLINDER |
| 'AC2676A1 | NOVELLUS | NYLON LIFTOFF HINGE PIN |
| 'AC2712A1 | NOVELLUS | AURIGA TEFLON SPRING LOADED CARRIER SEAL |
| 'AC2729A1 | NOVELLUS | SHIM,1/2"IDX3/4"OD,.001"TH |
| 'AC2730A1** | NOVELLUS | SHIM,1/2"IDX3/4"OD,.003"TH |
| 'AC2731A1** | NOVELLUS | SHIM,1/2"IDX3/4"OD,.010"TH |
| 'AC2733A1 | NOVELLUS | AURIGA,PAD CONDITIONR,ROTATION FLANG BRG |
| 'AC2747A1 | NOVELLUS | SERVO AMP |
| 'AC2749A1 | NOVELLUS | AURIGA, PAD COND. DOWN FORCE LOAD CELL |
| 'AC2780A1 | NOVELLUS | AURIGA,SENSOR AMPLIFIER,AUTO FAME FS2-62 |
| 'AC2846A1 | NOVELLUS | TUBE, CORRUGATED, TFE, 1/2" X1 |
| 'AC2852A1 | NOVELLUS | AURIGA CARRIER, UP/DOWN PRESS. REG. |
| 'AC2856A1 | NOVELLUS | CONTROL,VALVE SPEED |
| 'AC2918A1 | NOVELLUS | BEARING, BALL, LINEAR, SST, 1/ |
| 'AC2919A1 | NOVELLUS | SEAL,TEFLON,SPRING LOADED |
| 'AC3012A1 | NOVELLUS | PSH BTN GRN MOM |
| 'AC3014A1 | NOVELLUS | AURIGA, CUP DOWN AND SCRUBBER UP SENSOR |
| 'AC3034A1 | NOVELLUS | SPACER,ROUND,ALUM,.14X.25X.125 |
| 'AC3037A1 | NOVELLUS | SENSOR, LEAK, PVC |
| 'AC3038A1 | NOVELLUS | PAPER,MEDIA,LEAK DETECTOR(10 PK) |
| 'AC3086A1 | NOVELLUS | AURIGA, NORGREN VALVE, MHTA, 5P 2POS |
| 'AC3087A1 | NOVELLUS | VALVE,MANIFOLD5P,3POS,24VDC |
| 'AC3091A1 | NOVELLUS | GAUGE REG, SPD CONTROL |
| 'AC3100A1 | NOVELLUS | AURIGA PRESSURE GUAGE 0-60 PSI |
| 'AC3141A1 | NOVELLUS | VALVE,CHECK,(OLD STYLE) PARKER |
| 'AC3552A1 | NOVELLUS | SENSOR,CYLINDER UP |
| 'AC3623A1 | NOVELLUS | SENSOR, FIBEROPTIC, REF., 5M |
| 'AC3683 | NOVELLUS | SCREW M4-17X16 NYLOCK,SOCH |
| 'AC3767 | NOVELLUS | AURIGA,PADCOND,ROT BRG.SPRNG LOADED SEAL |
| 'AD2058A-1 | NOVELLUS | PLUG,ARM BEARING SUPPORT-MHA |
| 'AD2095B1 | NOVELLUS | SUPPORT SHAFT IDLER PULLEY,SCRUBBER |
| 'AD2147B1 | NOVELLUS | PIN, SHOULDER |
| 'AD2206A1 | NOVELLUS | AURIGA, UNLOAD ELEVATOR DUMP VALVE |
| 'AD2209A1 | NOVELLUS | CAP,AIR TUBE MAIN LINER |
| 'AD2319C1 | NOVELLUS | AURIGA, PADDLE, 200MM WAFER, UNLOAD |
| 'AD2333A1 | NOVELLUS | SHIM,FLAT,.25 THK AD2333A1 |
| 'AD2369B1 | NOVELLUS | CLAMP, BELLOWS-POLISH ARMS |
| 'AD2392C1 | NOVELLUS | SHAFT, VACUUM |
| 'AD2460C1 | NOVELLUS | SHAFT, SPRING RETAINER-LOAD/UNLOAD CUP |
| 'AD2536C1 | NOVELLUS | SCREEN DRAIN AUTO FRAME |
| 'AD2608A1 | NOVELLUS | SUPPORT,PARK POSITION,MAIN LINER |
| 'AD2705A1 | NOVELLUS | SHIM,MYLAR,(RED)50UM |
| 'AD2767A1 | NOVELLUS | GUIDE FRAME COVER |
| 'AD2954A1 | NOVELLUS | BRUSH,CARRIER EDGE |
| 'AD3132 | NOVELLUS | COUPLER,SCRUBBER MOTOR |
| 'AD3165 | NOVELLUS | WATER TRACK BRIDGE |
| 'AD3219 | NOVELLUS | ELEVATOR COVERS |
| 'AD3352 | NOVELLUS | AURIGA, PAD CONDITIONER, PLASTIC ADAPTER |
| 'AD3357 | NOVELLUS | HOUSING, SPRING SEAL |
| 'AJ215004 | NOVELLUS | SCREW 472,SHLDR 4-40 X 1/8 X 3/8 SST |
| 'BA220016 | NOVELLUS | NUT,JAM 5/8-18 SST |
| 'BB95-200075 | NOVELLUS | DRIVER-MOTOR PANASONIC MOTOR |
| 'CE020187 | NOVELLUS | CUP, RLR BRG 3.1510 OD |
| 'CE020261 | NOVELLUS | 472, PLATEN SPINDLE BEARING RACE |
| 'CF020187 | NOVELLUS | CONE, RLR BRG 1.500 BORE |
| 'CF020252 | NOVELLUS | 472, PLATEN SPINDLE BEARING |
| 'CH030669 | NOVELLUS | BEARING, NDL 2-1/2 OD 1. |
| 'CH030673 | NOVELLUS | BEARING, NEEDLE 2-1/8 OD 1.50 LG |
| 'CH031086 | NOVELLUS | BEARING, NDL 1-1/4 B 1-1/2 OD 1"W |
| 'CH310001 | NOVELLUS | BEARING,NEEDLE 1-1.2 OD.750 LG |
| 'CH310003 | NOVELLUS | BEARING,NEEDLE 1-1/8 OD 1.00 LG |
| 'CJ030111 | NOVELLUS | BRG,THR, 1.437 OD |
| 'CJ030114 | NOVELLUS | BRG, THR, 1.250 B X 1.937 OD,.060 |
| 'CJ030115 | NOVELLUS | BRG, THR, 1.250 B X 1.937 OD, |
| 'CM4/8N/D | NOVELLUS | BEARING, PLASTIC, SPEEDFAM SCRUBBER |
| 'CMP301E06 | NOVELLUS | FILTERS D7000 |
| 'CN070325 | NOVELLUS | BRG,BALL,.6693 B,1.5748 OD,.4724 W |
| 'CN071337 | NOVELLUS | BRG, BALL, 45MM B, 85MM OD, 19MM W |
| 'COMPACT QM96-37733AIR CYLINDER | NOVELLUS | AURIGA,MHTA CLAMP CYLINDER |
| 'COMPACT RFH 11/8X2,AIR CYLINDE | NOVELLUS | AURIGA, LOAD/UNLOAD CUP, LIFT CYLINDER, |
| 'CQ040000 | NOVELLUS | BUSHING STRAIGHT BRONZE 1/4" |
| 'CQ040005 | NOVELLUS | 472 CARRIER SPINDLE DRIVER BUSHING |
| 'CS210008 | NOVELLUS | BRG SPHERE, .500 B, 1.000 OD |
| 'CV440030 | NOVELLUS | 472 SHUTTLE ASSEMBLY,OUTER MOUNTING SLID |
| 'DS070060 | NOVELLUS | COUPLING - FLEX POL ARM DRIVE |
| 'DS070095 | NOVELLUS | CPLG, FLEXIBLE |
| 'DS080020 | NOVELLUS | CPLG, SHAFT, 5/8 X 5/8 |
| 'DS170040 | NOVELLUS | COUPLING, SHAFT |
| 'DU130046 | NOVELLUS | 472, DAMPER, LOAD SHUTTLE |
| 'EA110130 | NOVELLUS | 472-PLATEN SHAFT MOUNT GEAR REDUCTION |
| 'ED090167 | NOVELLUS | 472, PLATEN, DEUBLIN ROTARY UNION |
| 'ED090171 | NOVELLUS | UNION, ROTATING, DUOFLOW ELBOW, 1/8 |
| 'ED160040 | NOVELLUS | UNION, ROTARY ELBOW, .25NPT X .25T |
| 'ED190020 | NOVELLUS | UNION, ROTARY |
| 'EJ010505 | NOVELLUS | BELT, V, 472 PRIMARY PLATEN 2/3VX335 |
| 'EJ010513 | NOVELLUS | BELT V, 472 FINAL PLATEN, 2 / 3VX530 |
| 'EKE21V150W | NOVELLUS | HALOGEN LAMP |
| 'EP010154 | NOVELLUS | TIMING BELT - PULLEY-3/8P 1/2WIDE |
| 'FAIRCHILD TT6000-404 TRANSDUCE | NOVELLUS | AURIGA, FAIRCHILD 30PSI,PAD CONDITIONER |
| 'FJ032441 | NOVELLUS | 472, THERMOCOUPLE, PLATEN TEMP. - 6" |
| 'FJ032589 | NOVELLUS | 472 CARRIER SHAFT LOWER SEAL |
| 'FJ032929 | NOVELLUS | 472,SEAL,PLATEN HUB,LOWER |
| 'FJ033782 | NOVELLUS | 472,SEAL,PLATEN HUB,UPPER |
| 'HA010079 | NOVELLUS | NOZZLE, SPRAY, 1/8 NPT, 90 DEG, PVC |
| 'HA010080 | NOVELLUS | NOZZLE,SPRAY |
| 'HD640046 | NOVELLUS | REGULATOR,W/GUAGE |
| 'HE820034 | NOVELLUS | VALVE 2-WAY NPT |
| 'HF260022 | NOVELLUS | AIR CYLINDER 9/16IN BORE 1IN STR |
| 'HG090018 | NOVELLUS | 472, 40 MICRON FILITER ASSEMBLY |
| 'HG140029 | NOVELLUS | 472,FILTER,REPLACEMENT,140UM |
| 'HG140030 | NOVELLUS | FILTER W/ ELEMENT 140 MICRON |
| 'HG960046 | NOVELLUS | 472 VACUUM GENERATOR FURON |
| 'HM280395 | NOVELLUS | REPLACEMENT ROTOR |
| 'HP160005 | NOVELLUS | 472,HEAT EXCH. PUMP W/MOTOR 115VAC 60HZ |
| 'HS190000 | NOVELLUS | FLUID SENSOR CONTROL UNIT |
| 'HS190002 | NOVELLUS | FLUID SENSOR-PTFE ENCAP SENSOR H |
| 'HT170014 | NOVELLUS | PRESSURE SWITCH 35PSI DECRSNG |
| 'HU020032 | NOVELLUS | SENSOR,FLUID FLOW |
| 'HV020029 | NOVELLUS | OPTIC LEVEL SENSOR |
| 'HV110025 | NOVELLUS | LEVEL SWITCH |
| 'HV160001 | NOVELLUS | SWITCH,FLOAT,VERTICAL POLYPRO |
| 'HW150005 | NOVELLUS | THERMOSTAT,IMMERSIBLE |
| 'HY210013 | NOVELLUS | FLOW CONTROL |
| 'JE360145 | NOVELLUS | ELBOW,MALE TUBE JE360145 |
| 'LC-07013-04 | NOVELLUS | SLURRY PUMP SCREWS,IPEC (PACK OF 4) |
| 'LC-07013-76 | NOVELLUS | SLURRY PUMP ROTOR,IPEC |
| 'LC-07018-91 | NOVELLUS | SLURRY PUMP HOUSING,IPEC |
| 'LC-07021-04 | NOVELLUS | SLURRY PUMP WASHER,IPEC (PACK OF 10) |
| 'NE380045 | NOVELLUS | 472 SHUTTLE ASSY CENTER ADJUSTING SLIDE |
| 'NQ790005 | NOVELLUS | 472 PLATEN BRUSH |
| 'PA020023 | NOVELLUS | SWITCH,PUSH BUTTON |
| 'PA020025 | NOVELLUS | ACTUATOR,PUSHBUTTON RECT MOMENTARY |
| 'PA020056 | NOVELLUS | OPERATOR E-STOP BUTTON MAINTAINED |
| 'PB020012 | NOVELLUS | SWITCH,EMO,ACTUATOR-PUSHBUTTON |
| 'PE010032 | NOVELLUS | SHUTTLE JAM SENSOR/SWITCH |
| 'PE010054 | NOVELLUS | SWITCH,INTERLOCK |
| 'PE010695 | NOVELLUS | SWITCH,ROLLER LEVER |
| 'PK010046 | NOVELLUS | 472 LOAD/UNLOAD SERVICE SWITCH |
| 'PK010047 | NOVELLUS | ROCKER OPERATOR, WHITE |
| 'PM020015 | NOVELLUS | ACTUATOR,2 POSITION KEYLOCK |
| 'PU160035 | NOVELLUS | SENSOR,FIBER-OPTIC FU37 |
| 'PU160040 | NOVELLUS | 472,THRU BEAM SENSOR,WAFER MAPPER,PZ-51L |
| 'PU160042 | NOVELLUS | SENSOR,KEYENCE |
| 'PU160046 | NOVELLUS | AMP,KEYENCE,472 UNLOAD SHELF FS2-62 |
| 'PU160081 | NOVELLUS | SENSOR FIBER OPTICS 472 WATER TRACK |
| 'PU690045 | NOVELLUS | 472 LOAD/UNLOAD ELEVATOR RODLESS CYL SEN |
| 'QA110073 | NOVELLUS | LAMP,28VAC |
| 'QG010044 | NOVELLUS | ALARM- CONTINUOUS TONE |
| 'QK060008 | NOVELLUS | FUSEHOLDER, 3AG |
| 'QM170014 | NOVELLUS | CONTACTOR, 60A 3-POLE 24VDC COIL |
| 'QM170020 | NOVELLUS | CONTACTOR, ADDITIONAL CONTACTS-LP1 |
| 'QN040027 | NOVELLUS | HEATER ELEMENT - OVERLOAD 200/230V |
| 'QR280032 | NOVELLUS | SWITCH,SOLID STATE(SSAC P/N KSD321P) |
| 'QT330136 | NOVELLUS | PWR SUPPLY, 48VDC, 20.5A |
| 'QT330152 | NOVELLUS | 472, POWER SUPPLY, +/- 15, +/- 12 , &5 V |
| 'QU140006 | NOVELLUS | 472,MOTOR CONTROLLER,CARRIER ROTATION |
| 'QU140073 | NOVELLUS | 472 MOTOR CONTROLLER,SLURRY PUMPS |
| 'QV110105 | NOVELLUS | 472, SLURRY PUMP MOTOR |
| 'QV130015 | NOVELLUS | 472, LEESON DRIVE MOTOR |
| 'RA010001 | NOVELLUS | 472, LOW VOLTAGE CABINET FAN |
| 'RA030037 | NOVELLUS | 472 HIGH VOLTAGE CABINET FAN |
| 'RE120030 | NOVELLUS | THERMOCOUPLE,PLATEN TEMP. |
| 'RE180010 | NOVELLUS | 472 IR SENSOR CONTROLLER W/CABL RE180010 |
| 'RE230001 | NOVELLUS | HEATER, IMMERSION 3KW 240V 1PH |
| 'RP020161 | NOVELLUS | JUMPER,SHORTENING |
| 'SMC NCDA 1B400-0400N-A53L3-XB9 | NOVELLUS | AURIGA, ARM, UP/DOWN AIR CYLINDER |
| 'TA100014 | NOVELLUS | DIGITAL BRAIN BOARD |
| 'TA100016 | NOVELLUS | ANALOG BRAIN BOARD |
| 'TA100148 | NOVELLUS | BOARD,TERMINATION, TERM-1 OPTO022 |
| 'TC050046 | NOVELLUS | BASE,EXPANSION, 5 SLOT |
| 'TC100013 | NOVELLUS | I/O RAIL,ANALOG OPTO 22 |
| 'TC100032 | NOVELLUS | 32 CHANNEL DIGITAL RAIL |
| 'TC100039 | NOVELLUS | BOARD,OPTO22 JUMPER STRIPS |
| 'TE050045 | NOVELLUS | CABLE EXPANSION |
| 'TH050005 | NOVELLUS | DRIVE,SOLID STATE DUAL |
| 'TN100013 | NOVELLUS | QUAD INPUT MODULE IDC5Q |
| 'TN100021 | NOVELLUS | 472,OPTO 22 THERMOCOUPLE INPUT MODULE |
| 'TN100024 | NOVELLUS | MODULE, INPUT ANALOG ISOLAT |
| 'TN100026 | NOVELLUS | MODULE, INPUT ANALOG AD6 |
| 'TN100027 | NOVELLUS | 472 ANALOG INPUT MODULE 0-10V |
| 'TN100028 | NOVELLUS | ANALOG INPUT, 0- 50MV |
| 'TP050049 | NOVELLUS | MODULE,OUTPUT PLC 5/24VDC 32PT |
| 'TP100014 | NOVELLUS | QUAD OUTPUT MODULE ODC5Q |
| 'TP100024 | NOVELLUS | MODULE, OUTPUT ANALOG 0-5VDC ISOL |
| 'TP100025 | NOVELLUS | 472 OPTO ANALOG OUTPUT MODULE, DA5, TP10 |
| 'TP100028 | NOVELLUS | 472, OPTO OUTPUT MODULE 0-5VDC ISOLATED, |
| 'TR030005 | NOVELLUS | 472 MOTOR CONTROLLER,SIGNAL CONDITIONER |
| 'TR440010 | NOVELLUS | 472,SENSOTEC,AMPLIFIER,DOWNFORCE |
| 'TS4000 | NOVELLUS | TS4000 CABLE |
| 'VA020392 | NOVELLUS | RESISTOR,2.26K 1% 1/4WATT |
| 'VF150225 | NOVELLUS | ENCODER, OPTICAL |
| 'VN001115 | NOVELLUS | CAPACITOR MONO CERAMIC.1UF 50V |
| 'VR410169 | NOVELLUS | VARISTOR,500V |
| 'VV000266 | NOVELLUS | I.C. HEX INVERTER DC |
| 'YY4112160 | NOVELLUS | FILTER BOWL D7000 |
| 'YY41HA20A | NOVELLUS | FILTER HEAD D7000 |
| 'YY4610190 | NOVELLUS | FILTER BRACKET D7000 |
| '22-00612-00 | NOVELLUS | BACKSIDE NUPRO VALVES, FEMALE, NC, |
'0.1UM ENTEGRIS FILTER 3/4 '1220-269 ENTEGRIS ENTEGRIS SPLASH GUARDS(DELETED) '151-140-01 ENTEGRIS 01KIT,DISP.HEAD KEY,CHNG-OUT,NITRIC ACID '151-140-02 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,H2S04 '151-140-03 ENTEGRIS KIT,DISP.HEAD KEY, AMMONIUM HYDROXIDE29% '151-140-05 ENTEGRIS DHT KEY CODE RING, HCL '151-140-06 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,HF49% '151-140-08 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,H3P04-85% '151-140-09 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,H202 31% '151-140-10 ENTEGRIS KIT,DISPENSE HEAD KEY CODE RING '151-140-13 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,IPA '151-14...