TEL ULVAC TEGAL 1805-220008-11 1011976 33-337-001 INNER BELLOWS 1805-220012-14 1014896 33-338-001 BELLOWS OUTER 1810-221018-14 1015980-07 33-349-004 ELECTRODE, CONDEHEAD UPPER 1810-221329-12 1016689-03 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 1810-221439-02 1016698 37-221-002 UPPER ELECT ANOD, NON ANODIZED 1810-221470-24 1017446-01 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 1810-221471-24 1018517-02 39-292-003 UPPER ELECTRODE 1810-222433-11 1018517-03 39-306-001 UPPER ELECTRODE 10 HOLE 1810-222443-11 1018518-02 39-424-001 ELECTRODE LOWER 5" 1810-222662-11 1018518-03 39-676-001 ELECTRODE, UPPER WAFER JACKET 1810-323878-14 1018882-02 39-680-003 ELECTRODE, CONEHEAD VENTED 1810-324934-13 1019020-04 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 1810-428037-11 1023312-02 39-700-007 ELECTRODE, HEATED UPPER 1810-428038-12 39-709-002 ELECTRODE, LOWER 5" 1810-428721-11 39-714-006 SHELF WAFER 1D05-300040-13 39-735-003 ELECTRODE, LOWER 5" 1D05-300052-13 39-735-007 ELECTROD