OEM P/N supply - 21'

0020-31739	CARRIER ESC FOCUS RING ,
0020-09201	PLATE GAS DIST LOWER 8.5 "OD 8" QUARTZ A  (P/N:0020-09201)
3020-01085
3020-01053	CYL AIR 2.5BORE 1.0 STROKE DBL ACT
3220-01051
3870-01300:
0020-70271
0020-70272
0190-70075
3780-01107
3700-01484
3330-01085:	SPUR GEAR
3700-01485
0090-09166	Assy HV ESC 200mm
0020-31288	OEM NEW
0020-31288 (2)	2ND SOURCE NEW
0150-00490
3700-03050	SEAL ASSY .380ID .575OD AVALON 56/301SST
3700-00506:	SEAL QUAD-RING .362ID .109CSD KALREZ 85
3700-01065	ORING ID 1.489 CSD .070 VITON 75 DURO BL ,
3700-01238	O-RING ID.239 CSD .070 VITON ,
3700-01080	ORING ID .739 CSD .070 VITON 70DURO ,
3700-01345	O RING ID.737X.103W VITO ,
10-00186-00
02-00343-02	ASSY,SNSR,HARN 10.0
02-00343-03
02-00343-04
60-00013-00
0040-09069	CABLE ASSEMBLY (ROBOT WIRE)
3700-01485	SEAL(ROBOT ROTATION)
0020-76065	IDLE GEAR ROBOT DRIVE
3080-01030	Rot. BELT TMG 3MMP 6MMW 95T HTD NEOPRENE
3080-01029	Ext. BELT TMG 3MMP 6MMW 84T HTD NEOPRENE
0090-09016	Motro encoder assy , EXT
0200-01009	Top Nozzle
0190-35875	Heater driver
0090-75008
0190-38517	RTP lamp .
3080-01048
0870-01013	DRIVER STPR 5PHASE HGH SPEED ,
0020-76099	fitting seal , robot
0190-35030	LAMP HOLDER
0090-35062	HEATER 50W*8/R2,LID
0090-02980	MOTOR BRAKE ENCODER ASSY
0090-35123	MOTOR & CABLE ( M21NRXD-LSS-M1-02 )
0020-13963	WBLL BRKT, LED BOARD MOUNT, FAST WAFER MAPPING
0020-13965	COVER WAFER MAP LED, FAST WAFER MAPPING
0090-76037	ASSY, LED-WB, FAST WAFER MAPPING
0100-00379	PCB ASSEMBLY, SERIPLEX I/O DISTRIBUTION, RPS2 GPLIS
0030-20006	COVER SOURCE 13"
0500-01047	ASSY  END POINT DETECTOR UNIT DXZ
0500-01048	ADPTR ENDPOINT DETECTOR DXZ
0242-32838	KIT, SMOKE DETECTOR CENT CNTLR
1400-01046	SNSR  SMOKE DETECTOR AMPLIFIER
0010-40155	Assy, Wafer Detector
0100-01135	Remote Seriplex Board
1270-01622	SW PRESS ABS 250-320TORR 0.1 -1A @ 12VDC 50DEG-C
1400-01046	SNSR  SMOKE DETECTOR AMPLIFIER
0015-09042	RESISTOR, CERAMIC, NEAR-NET SHAPE
0021-09105
3500-01045
3420-01042	silicon pad
1310-01086	Side  T.C
0090-75007 (0090-02980)	motor brake encoder assy
0090-75010	motor
1080-01132	GEAR BOX REDUCTION 5:1 1/2"DIA. OUTPUT S
3060-01693	BEARING W/OUT ADAPTOR,1.25IDX1.406OD
3700-01114	SEAL FLANGE 1-7/32 ID 3/16 CSSST 304/FL
3700-01355 (3700-06217)	SEAL , DYNAMIC RADIAL 1.216ID , new replacement #3700-06217
0870-01002	DRIVE 5-PHASE STEPPER MOTOR
3440-01037	WDO SAPPHIRE LENS
0020-40190	VIEW PORT
3870-00908	53-710150-000/ 3870-00908.
0200-04294	ALN Top Baffle
0190-18430	Saphire Probe Mount Assy
0020-28213	Lift Pin Holder
0040-84650	BELLOWS, INCONEL WELDMENT, LIFT MECH ASSY, 300MM HDPCVD
0100-00444	PCB ASSEMBLY, HDP 300MM REMOTE DIST. BD.
0020-23349	Heater base insulator
3700-04595	SEAL CTR RING ASSY NW80 W/KALREZ 8085 ORING SST W
3700-04730	SEAL CRR RING ASSY NW100 W/KALREA 8085 ORING SST W
0090-70000	Motor-Brake-Encoder, Assy. Cassette Handler P-5000
0020-31288	adaptor top lid
3700-01547	DYN SEAL
0090-02980	Motor brake assy
0090-02981
0090-02982	MOTOR BRK ASSY ENCODER ASSY
0050-40928	IHC extension manifold
0010-76004	ROBOT BLADE ASSY
0010-76859
0010-76858
0100-76038
0190-35712
0190-19170	Lamp Assy, 10 Pack
0040-02520	Gas Box, Silance 200mm Producer
0660-01846	Device net
3080-01063	BELT TMG 1/5PITCH X 3/8W X 55GRV X 11L NEOPRENE
3080-01039	BELT  TMG .080P 3/16W 70T URETHANE BODY
0140-10005
0140-10007
0020-20699
0050-22569
3400-01134
3310-01055
0140-10006
0200-35287	BASE,CATHODE,INSULATOR,DPS
0010-20772	ASSY, DRIVE SCREW, MOTO LIFT
3220-01051	CPLG FLOATING JOINT 1/2-20 UNF
0200-02980
0200-02981
0200-02272
0190-47374
0090-03991	assembly pyrometer
0242-15620	Assy rotation driver,motor ,
3870-01494	valve penu BLWS 1400 PSI 1/2VCR-F/F N/O 20
0100-00379
0060-01846
0100-09153	PCB,GAS PANEL INTERFACE W/O STANDOFFS
0150-00490	CABLE｜HEATER LIFT｜GIGA-FILL SACVD
3700-06294(3700-01623 Obsolete)	WIPER/SCRAPER RING
0150-76099	HARD DISK CALBLE,
0150-00490	CXZ Heater power cable,
0040-40460	RPS Gen. to chamber body adoptor,AMAT,0040-40460
0140-06248	RPS signal control cable
0150-39391	RPS POWER cable
3700-01658	ORING ID.426 CSD.070 CHEMRAZ
0021-35008	REFLECTOR PLATE 200MM (AMAT)
3700-01710	ORING AS568-011 CHEMRAZ SC51
0040-09004	Bellows Lift Bearing
3700-01898	Dynamic seal
0200-36118	BATCH EDGE RING, 200MM WAFER, SILICON
0200-36120	ADAPTER RING, 150MM WAFER, SI BATCH COATED
0100-35065	SERIAL ISOLATOR
0100-00899	ROTATION PCB
0150-10261	liquid line heat up ( 2 M ) Temp: 100‾200 degree C
1010-01116	AMAT Applied Materials Endura PVD Lamp Halogen 120v Jcd120v-800wc
0190-40271	LAMP 10-PACK CYCLED 520 WATT FUSED RADIA.
0190-36349	LAMP ASSY CYCLED 480W +/-5% XE CHAMBER
1010-01088	LAMP BULB 2P-TUNGST 120V 1KW 1500HR-LF.
0520-01031	ACTRRTRY 280DEG SGL SHAFT GREASELESS
0200-50107	MODIFY SINGLE RING DPS NOTCH
0200-10377	RING SINGLE 195MM SEMI NT CER DPS CHMB
3700-01114 *	NBLL Dynamic Seal / 3700-01114
3700-01403	NBLL Dynamic Seal / 3700-01403
0020-07488	FEEDTHRU, HELIUM, HOUSING AP / 0021-07488
0021-10643	FEEDTHRU,HELIUM,INSERT / 0021-10643
0021-02099	NUPLATE, HOUSING, HE FEEDTHRU / 0021-02099
0200-09636	DC BIAS PLUGS
1200-01081	RLY CNTOR 3P 600V 32A/RES 45A/NONRES 120VAC 50HZ
0680-01198	Description: CB MAG 2P 240VAC 30A LOAD SIDE ACCEPT
3700-01114	2019.7.8 Quote
0040-92004	Drive Bullet.
0040-91341	Tube Drive Cass. Indexer.
0020-81227	Clamp Filament L/H.
0130-90027	24DC / 24VAC-20kGz (DAQ Inverter)
0090-90966	CHAS MDL DAQ MKII Type B
0020-83382	ARM, FINGER - STANDARD
0020-83405	ARM, FINGER - EXTENDED 5
0020-83406	ARM, FINGER - EXTENDED 6
0020-81076	GASKET, HEATSINK-125/150 INSERT
0020-82055	Vacuum Thumbscrew,  M4
0200-01668	Filter 670 nm
0040-32905	Electrostatic Chuck for HDP 150 mm
0190-18144	Filter for ETO Rack
0190-18157	Filter for ETO Rack
0840-00267
0200-09969	Viewport for DxZ (WINDOW, SIDE, UV COATED, SAPPHIRE, DXZ)
0020-94104	Shim Inner for AMAT 9500xR
0010-09672	PLASMA SENSOR ASSY,PRSP
0021-10643	FEEDTHRU,HELIUM,INSERT
0020-98018 or 0021-10851	ASP+ CAP FLANGE
0190-09459	CABLE ASSY, FIBER OPTIC 20 FT.
0040-09944	BELLOWS GAS LINE W/FLAT WXZ
0150-00910	heater cable
0090-09052	LOW LEVEL SENSOR RECEIVER H2O VDSII
0090-09059	HIGH LEVEL SENSOR RECEIVER H2O VDSII
0030-20006	COVER SOURCE 13INCH
0030-20020	COVER SOURCE 13" G-12
0190-18262	RING SPACER ESC PEDESTAL ULTIMA HDPCVD 30pcs
0020-40190	UV FILTER 6pcs
0090-35123	lifter motor (Powermax II Motor,Brake,Storage M21NRXD-LSS-M1-02 )
0030-00246	LIP SEAL, 365ID X .130 THK
3700-01623	SEAL  WIPER 1.25 SHAFT MOLY/POLYURETHANE
3700-03162	SEAL  ASSY FLANGED 1.218ID 1.853OD .250X.218CS, w pcs:
3700-01548 (3700-03163)	DYN SEAL
0030-20012:	Cover plate , laser
0030-00015
0150-36190	CABLE,RF MATCH CNTRL,SERIPLEX,DPS
0200-03425	cylinder 80SR Wafer support 200mm.
0200-03425	Cylinder 80SR Wafer Support 200mm RTP
0010-02016	PCS ASSY , ANALOG SYNC DETECT
3700-03682	seal
0190-09781 ( (0190-28684)	Mxp+ Separation Ring
1120-01116	cable , optical fiber
0190-38517	Lamp 10-Pack For Spike(new):  for 10 pcs/pack
0190-22509	LAMP,USHIO BNA6,EPI
0190-21303	CABLE ASSEMBLY, RF MATCH, PRECLEAN 2,
0090-09059	HIGH LEVEL SENSOR RECEIVER H2O VDSII
0240-76625	KIT, PALL FILTERS-PROC/HTR LINES , no quote
0190-13035	LAMP QUARTZ 500W 120V T3 TRANSLUCENT
0190-13035	lamp , bakeout with lugs
1140-01104	ion gauge power supply
0021-37158	KAPTON PAD, EHP-CR ROBOT BLADE
3690-03726	SCR CAP SKT HD 4-40 X 3/8L HEX SKT 316SST EP
0010-54227	OSRAM 750T4Q/JKT/LDS HALOGEN LAMP 750W120V
0620-01270	CABLE ASSY SNSR .062-BUNDLE 72 L INTERLC
0015-09325	ADAPTER, 1/4 VCR TO 5/16-24UNF
3570-00002	RODQUARTZ SNSR-TIP .75LG 5/16-24THD SST
0040-37007	cover plastic , giga-fill SACVD
0100-01665	PCB ASSEMBLY, LCF EMITTER TOP INTERCON
0100-00788	PCB ASSY, LCF EMITTER BOT INTERCON
3690-03716	SCR CAP SKT HD 4-40 X 1/4L HEX SKT 316SST EP
0040-40460	Tube, Adapter Astron Giga Fill SACVD- New
0010-76317	motor assy'
0030-00246
0190-35525	Thermocouple T/C CxZ New with certs
0200-02042	Pin cover SIP II 200mm
0190-03615	BRG, ANGULAR CONT, 1.375 OD X 1.0 ID
3700-00506	SEAL QUAD-RING .362ID .109CSD KALREZ 85
3330-01085	Gear Spur 200mm THROTTLE VALVE
0040-01690	LIGHTPIPE, CATHODE TEMP, SUPER-E
0190-36456	FEETHRU,HELIUM DUAL ZONE
0040-40460	Tube, Adapter Astron Giga Fill SACVD- New
0040-37007	cover plastic , giga-fill SACVD
0010-76317	motor assy'
0190-35525	Thermocouple T/C CxZ New with certs
0200-02042	Pin, Cover, SIP II 200mm
0190-01496	Defas driver controller
3700-01362	SEAL  ASSY FLANGED 1.218ID 1.853OD .250X.218CS
3700-01363	SEAL  ASSY 1.218ID 1.436OD .254X.218CS
0040-61877	LID PUMPING PLATE TEOS GIGAFIL SACVD
3700-06294	repalce 3700-01623 obsolete
3700-01484	Dyn seal , Radial
3700-01485	Dyn seal , Radial
0020-76065	Idle gear robot drive
0030-00246	LIP SEAL .365ID X .130 THK
0200-02042	Pin, Cover, SIP II 200mm
0090-09166	Assy HV ESC 200mm
0040-36026	Basic lamp hpusing RTP
3700-00506	SEAL QUAD-RING .362ID .109CSD KALREZ 85
3330-01085	Gear spur 180T 2.50PD 1/4 Bore 303SST 20
0190-36456	Feedthru , Helium Duzl Zone
0190-28684	(0190-09781)
0020-38791
0200-01668
0090-76207
0030-00251	DISK , VITON CENTERING
0040-21294	cover ,motors deirect drive robot
3440-01048	Lens , Convex
0190-09297
0200-04294
0020-18899
0020-52048
0200-05082
3500-01428	nut thumb 8-32x.125THK (MOQ:35)
3400-01151	Hose Assy
0190-35902	Screw Drive Throttle Calve 5 Phase
0010-75523	ASSY , HDP EXTENDED ROBOT WRIST 6/8
0020-31739	Carrier ESC Focus ring
0100-20235	PCB , Obsolete
0140-18117	Harness assy, water leak detector
0020-10702	Retainer Seal Throttle Valve
0090-09051	High level sensor emitter H2O VDSII
0090-09052	Low level sensor receiver H2O VDSII
0090-09053	Low level sensor emitter H2O VDSII
0010-06544	Assy trottle valve Dual flap SC200
0020-26439	Shield lower 6"G12 101 SST DBL , Knee
0150-20736	Cable assy HE pressure switch
0900-01063	FLTR Bandpass UV387 NM-CTR 2NH-HW 12.5M
0150-00490	CABLEHEATER LIFTGIGA-FILL SACVD
0021-09511	Insulater , Cathod Base 200mm DPS
0040-32200	Feed Cathod Supply DPS
0020-34988	Restricor , Helium  Flow Bulkhead
0021-09443	Plate Manifold , Cathod Bulkhead DPS
3700-03162	seal , MOQ: 6ea
3700-03163	seal , MOQ: 6ea
1080-01389 (0870-01028)	Motor Stepper Driver 5-phase
3700-03050	Seal , CTR Ring Assy (MOQ:25)
0090-03861 (0090-00768 )	LOADLOCK BRAKE INDEXER ASSEMBLY
0090-05790 ( 0090-20012)	Indexer Brake Assy Endura
0870-00035	2 phase driver , stepper motor
3870-01515	Valve fine Mtr 1/4 VCR Vernier HDL
0020-18380	HE Block, D/F Cathode, HDP-CVD (DCVD) - 2nd new
0020-18380	HE Block, D/F Cathode, HDP-CVD (DCVD) - oem new
3700-01403	Seal Dynamic Radial .474 ID x 3/16" CS 304 , MOQ 10
0010-01811	Bearing Assy, MSCD
0190-35292	LeadScrew Assy
0010-13264	ASSY, OUTER MAGNETS AND TUBE, HP ROBOT
0021-76841	PRESSURE PLATE,ROBOT BEARING SET
0040-75902	TUBE, ROBOT
0190-13206	BRG. BALL 1/8"6.00 BORE 6.50 O.OD. LVP G
0020-42316	SCREW PER PLATE VENTED EC LID WXZ
0020-42317	SCREW BLOCKER VENTED EC LID WXZ
0021-02395	INSERT RING, ALUMINUM, DXZ SACVD