跳到主要內容

2nd replacement

0021-34033

0021-34033/MEMBRANE CONTOUR  5ZONE

0040-88855

0040-88855/LAMP HOUSING,BRAZED FLEX

0200-07761

0200-07761/PIN ANTENNA POLI SI 300MM

0200-04877

0200-04877/SINGLE RING CERAMIC

0200-84596

0020-84596/FACEPLATE SILANE

0010-44213

0010-44213/PROBE,300MM RADIANCE RTP

0190-41005

0190-41005/CHILLER INR-496-003D

0190-38517

0190-38517/Lamp 10-Pack For Spike(new)

0190-22509

0190-22509/LAMP,USHIO BNA6,EPI

839-019090-328

E chuck 328 Sputtering Target

716-012640-012

WDO,GAS INJ,FACE SEAL,QRTZ,NSG

839-044157-031

UPPER ELECTRODE INNER/839-044157-031

715-801021-838

LAM Liner 2300 upper chamber coated

0190-09248

TC PROBE.CHUCK ASP p/n 0190-09248

0200-09757

RING, CLAMPING, FLAT, AL, 150MM, .95 HT, FINGER

1010-01088

LAMP BULB 2P-TUNGST 120V 1KW 1500HR-LF AMAT PN:1010-01088

0100-20070

Mag/Lamp Driver PN:0100-20070

3690-02620

Mounting bolts for Ceramic clamp ring 3690-02620

0200-00410

Process Kit 150 mm MxP+ (UNI-INSERT GAS Distribution 88 Holes 0200-00410

0200-10243

SHADOW RING, QUARTZ, 150MM, FLAT(1S)

0200-10073

INSULATOR QUARTZ 200MM SIMPLE CATHODE

0200-10133

Window Recessed Endpoint GECO 0200-10133

0020-31493

GAS DISTRIBUTION PLATE, UNILID, 133 HOLES 0020-31493

0200-09789

COVER, QUARTZ, 6", STEPPED, LIFT 2,FLAT

0020-34044

AMAT PN:0020-34044 Blok RF Insulator, Bottom

0020-34043

AMAT PN:0020-34043 Cover, Insulator Blok

0020-34831

AMAT PN:0020-34831 RF/HV Mounting Plate

0020-34694

LINER GDP R2 OXIDE GEC

0020-34695

LINER CATHOD FULL FLOW OXIDE ETCH

0020-34696

LINER,SLIT VALVE

0200-03312

AMAT, HOOP 140 FIXED FLOATING, 300MM PRODUCER

0200-03313,/ 0200-05621

Floating Ring

0200-03314

Lift Pin

0040-53688

Gas Box

0200-04235

ISOLATOR, CERAMIC, 300MM PRODUCER

0021-06499

Gas feedthrough(Teflon)

0200-05623

Top Liner

0200-03313

Floating Ring

0200-02396

LINER, CERAMIC MIDDLE, PRODUCER SE

0200-03414

Ceramic Bottom

0200-03406

Pumping Ring Side 1

0200-03407

Pumping Ring Side 2

0020-63185

Blocker Plate

0020-49785

Shower Head

0200-04118

RF Isolator

0040-63108

Manifold RPS II Side 1

0040-63107

Manifold RPS II Side 2

0200-01766

Manifold Ceramic,RPS

0200-01991

Lift Ring

0200-02395

Liner Ceramic Top Producer SE

0200-02397

LINER, CERAMIC BOTTOM, PRODUCER SE ,

0200-02407

Pumping Ring Ceramic C-Channel Side 1

0200-02408

PUMPING RING, CERAMIC C-CHANNEL, SIDE 2

0021-12790

Blocker Plate

0020-84596

Shower Head

0200-02469

Manifold Ceramic,RPS

839-020965-005

ASSY,ELCTD,OUTER,.18 STEP,INTL

716-053569-020

RING,QTZ,BKG PLT, GUARD, NCH

716-017581-002

RING,ELCTD,2PIECE

716-017112-430

RING,WAP,17.07X1.10THK,AN SLT,300MM

716-014843-001

RING,WAP,QTZ,GENERIC,17IN,DFC

716-044668-930

Silicon Edge Ring

716-037793-002

B,FOCUS, R CVR,DFC 300MM

716-031257-531

Top Edge Ring

716-026652-902

Bottom Edge Ring

716-003481-815

Ceramic Window

716-012639-117

Dual Zone Injector

839-019090-374

ESC

716-031257-309

RING,EDGE, TOP, 2300

716-026652-002

RING,EDGE,BOT,200-300MM

716-012639-024

GAS INJECTOR FOR LAM2300

0200-10466

Insert Ring, Silicon, 200mm, Notch(2)

0200-35801

Window, Recessed Endpoint, 4mm APERT

0200-09598

VESSEL SINGLE H2O VDSII

0200-25279

 

0040-21178

BELL JAR, CERAMIC 200MM

0200-00221

CERAMIC INSULATOR

0200-00218

COVER TOP CERAMIC

0200-00406

BUSHING PEDESTAL PC II

0200-39137

Dome Ceramec, DPS Chamber

0200-00149

Quartz Tube Applicator ASP+

0200-10160

Ceramic Liner(SiH4)

0200-10157

Liner Junction SiN Dxz

0200-00296

Sleeve Junction SiN Dxz

0200-10169

Edge Ring Ceramic Lock Down

0200-10284

Pin, Lifthea Ter, Dxz

0200-36631

Plate Cover, 8" Heater, Dxz, Patterned AL

0200-10164

Shield, Pumping Insert, SIN, Dxz

0200-39324

Ceramic Insertring

0200-35292

Window, Endpoint, DPS MEC

0200-35294

Quartz Lower Chamber VPRT DPS

0200-00247

Ring, Capture, 195MM SNNF Ceramic, DPS

0200-39133

Window Endpoint Inner DPS MEC

0200-39134

Window Endpoint Outer DPS MEC

0200-35291

Plug, Gas Nozzle, DPS MEC

0020-33804

Adapter, Gas Feed, DPS MEC

0200-05376

Quartz Tube, Applicator ASP+/0200-00149

0020-33815

Plate, Blankoff, DPS MEC

0200-35293

Window, Manometer Port, DPS MEC

0200-09201

Plate Gas Dist, Lower QTZ 8"

0200-09478

Plate, Gas Dist, Upper 200MM PRSP

0020-70285

Blade 8" Buffer Frog Leg

0200-39140

Rough Ring, Focus, Esc

0200-09444

CAP QTZ,TOP 25MM TUBE ASP

0200-36680

LINER QUARTZ,UPPER,GAS DIST,GROUND

0200-36682

LINER QUARTZ,LOWER,GAS DIST,GROUND

0200-10324

Dome, Ceramic, Dps Chamber, R1 Rough KC

0200-02116

INJECTOR, GAS, 24 HOLES, .020 DIA, .68 L.

0200-10263

WASHER, INSULATING, CERAMIC.

1D10-315183-15

SHIELD DEPO 85-M4(Y2-Y)(DRM2)

1D10-102848-13

PLATE BAFFLE M-9(Y2-Y)(DRM2)

0200-35843

TOP Cerimic Pumping

0200-36696

SHADOW RING QUARTZ 200MM NOTCH

0200-00051

WINDOW, LID ENDPOINT, QTZ. EMAX 200MM, NEW

0200-02117

INJECTOR GAS SEAL BLANK-OFF CERAMIC

0200-00033

EXT, QUICKK RELEASE, EP WIND, CT+, NEW

0200-01357

INSULATOR CERAMIC LIFT PIN ESC ASSEMBLY

0200-00250

RING CAPTURE C-ESC SNNF 200MM METAL

0020-39137

DOME CERAMIC DPS CHAMBER

0200-01195

WINDOW, IEP 300MM DPS2

0200-01903

INSULATOR PEDESTAL QUARTZ 300MM PCII

0200-01903

INSULATOR PEDESTAL QUARTZ 300MM PCII

0200-01942

LIFT PIN TIP, MAG LIFT, GROUND, 300MM

0200-03736

COLLAR 300MM PRODUCER ETCH

0200-06863

Deposition ring

0200-07238

INSULATOR EXTERNAL

0200-07359

INSULATOR, INTERNAL

0200-09716

Lift Pin Type

0200-10143

Ceramic insert ring

0200-10163

ISOLATOR SIN ENHANCED PUMPING LID DXZ;

0200-36630

Cover plate

0040-03771

Lid plate

0200-10286

Heater base >>Ring, Finger Lift Plate

0020-10158

Junction sleeve (inside pumping port)

0020-09373

SEAL, SMALL FACE

0020-31997

PEDESTAL, 150MM, AL, FLAT, FINGER

0030-00195

LARGE FACE SEAL 150MM

0200-09636

PLUG,SIC W/HEAD

0200-09735

COVER, CLAMPING RING, 150 MM, CERAMIC

0200-09758

COLLAR, 150MM PEDESTAL, AL, FINGER

0200-09759

SHIELD, 150MM PEDESTAL, AL, FINGER

0200-09602

PIPE, INSULATING, QUARTZ W/FLANGE

0020-31613

CYLINDER, LIFT, ALUM, 150MM

0020-31774

CYLINDER, HOT INNER

0020-30347

CYLINDER, EXTERNAL

0020-09031

INSULATING WASHER

0200-09447

PLATE QTZ,GAS DIST,UPPER 150MM ASP

0200-09448

PLATE QTZ,GAS DIS,LOWER 150MM ASP

0200-05377

TUBE PLASMA,25MM FOR P-5000

0200-09074

WINDOW WINDOW HTR 200mm

0020-31500

FINGER,CHUCK 1500MM,ASP

0200-09441

WINDOW, SLIT, PRSP

0020-30958

FILTER, SLIT WINDOW,PRSP

0021-09097

PLATE, LINER ALIGNMENT,

0200-10246

UNI-INSERT,GDP,LINER,88 HOLD, QTZ

0010-10982

SHELL ASSY,150MM,FLAT(1S),5.679DIA,5MIC

0010-10529

PEDESTAL ASSY, 150 mm FLAT(1S),NI LIFT

0200-09898

PLUG, BIAS, EXT PEDESTAL, GRAPHITE

0020-31740

VESPEL SCREW

0020-32049

CAP, VESPEL,ESC

0200-09785

CAP, 8,ESC,QUARTZ

0200-09657

WINDOW, RECESSED, ENDPOINT

0200-09782

PIPE,INSULATING,QUARTZ,LIFT,ESC

0020-31739

CARRIER,ESC,FOCUS RING

0020-31633

LIFT PIN, CONDUCTIVE

0020-32047

POST, LOWER, 2 PC, EXT PEDESTAL, LIFT

0020-32048

POST, UPPER, 2-PIECE

0020-32046

BASE EXTENSION ESC FOCUS RING

0020-31737

INSULATING FLANGE, TAPERED, ESC, TSB

0020-30198

TUBE EXTERNAL TAPERED EXT CATHODE

0021-09104

LINER CATHODE ALIGNED OXIDE ETCH

0040-33998

LINER SLIT LINER DOOR (WALL LINER)

0021-06092

DOOR SLIT LINER

0021-09718

LINER,SLIT VALVE(OBS 0020-34696)

BS02-00001

SHADOW RING, QUARTZ, 150MM, FLAT(1S)

BS10-00001

SHELL ASSY,150MM,FLAT(1S),5.679DIA,5MIC (SEC)

0040-31844

Bellow

3020-01125

CYL AIR 50MMBORE 35MMSTRK DBL-ACTW/AUTO-SW&CONN

0010-10185

Throttle Valve Drive ASSY

0021-09105

Lift Pin

0020-34040

Lift Pin (fixed)

0200-00250

Capture ring

0010-02609

Liner Cathode Magnet Super-e

0200-01511

Top Ring, NM, 200MM, OXIDE

0200-01509

INSERT RING, NM, 200MM NOTCH(2) TG, Super-e

0200-01119

SHADOW RING, QUARTZ, 200MM, NOTCH(2) TG, Super-e

0200-03319

WINDOW, RECESSED, ENDPOINT

0200-02527

300MM QUARTZ ROBOT BLADE

0200-02407

Pumping Ring Ceramic C-Channel Side 1

0200-02408

PUMPING RING, CERAMIC C-CHANNEL, SIDE 2

0200-02973

LINER, CERAMIC Middle, PRODUCER SE ,

0200-02974

LINER, CERAMIC BOTTOM, PRODUCER SE ,

0200-10296

INSULATOR BULKHEAD CATHODE DPS

0200-35623

INSERT RING, SILICON, 6" APPLIED MATERIALS

0200-76068

SHADOW RING QUARTZ 150MM APPLIED MATERIALS

0190-02853

6" VAT GATE  H-ANODAZED , PERF , AMAT P5000

0040-09069

CABLE ASSY, STAINLESS WIRES, AMAT P5000

0020-32364

BRACKET, RECESSED ENDPOINT, AMAT P5000/P5200

0050-30761

TUBE, GAS SUPPLY, SGD, AMAT P5000/P5200

715-011531-008

UPPER ELECTRODE , RAINBOW 4420

718-098591-001

SEAL PLATE, S-65 PENDULUM VALVE  (VAT P/N : 200500 ), LAM TCP9600

718-098592-001

LOCK RING, S-65 PENDULUM VALVE (VAT P/N : 202046 ), LAM TCP 9600

0020-32836

HINGE, REMOVABLE, RIGHT SLIT VALVE, AMAT P5000

0020-32837

HINGE, REMOVABLE, LEFT SLIT VALVE, AMAT P5000

0010-70161

DOOR, SLIT VALVE  ASSY, AMAT P5000

00020-31490

GDP, 37 HOLES, MxP, T=0.078", AMAT P5000 MxP

0020-70433

HINGE, RIGHT SLIT VALVE

0020-70432

HINGE, LEFT SLIT VALVE

0010-09088

P5000 ROBOT ALIGNMENT TOOL

5010-01017

THREAD LOCKING BEARING ( FOR P5000 ROBOT BLADE)

0010-10982

Shell ESC ASSY, MxP+, OXIDE, 150MM, FLAT, BRAND NEW

0200-34040

LIFT PIN, A6061+ANOD, L=50MM

0021-09105
(including 3500-01045)

LIFT PIN, A6061+ANOD, L=56MM, ADJUSTABLE

0020-32260

GDP, 37 HOLES, MxP, T=0.156", AMAT MxP

0020-31493

GDP, 133 HOLES, T=0.078", AMAT MxP

0010-75100

THROTTLE VALVE ASSY, MxP

0020-32259

GDP, 119 Holes, T=0.156", AMAT MxP

0020-31463

CARRIER CLAMP, COMPLIANT, EXT CATHODE

0020-30482

COUPLING FLEX

0020-30198

TUBE EXTERNAL TAPERED EXT CATHODE

0020-31147

INSERT BASE AL 150/200MM FLAT (Extender Cathode Cylinder (Poly M-Chuck)

0020-31767

CYLINDER, CLAMPING ,200MM POLY/WSI

0010-09985

PEDESTAL ASSY, 200MM, POLY/WSI, NOTCH, 2

839-093786-001

Bellow, VAT Gate Valve, 149.1mm, Short Adaptor

0015-09055

Sleeve Susceptor Bellow

3870-03605

Cylinder ,HDP Gate Valve

0015-09056

Wafer Lift Bellow, CVD Chamber

0015-09056

Wafer Lift Bellow, CVD Chamber

80-080-072

Pin Cylinder, Tegal 90X

80-080-077

Chuck Cylinder, Tegal 90X

3422001501

JUSUNG BELLOW, O3 CHAMBER PEDESTAL LIFTER

34220012

JUSUNG BELLOW, TiN CHAMBER PEDESTAL LIFTER, TUBE

34220016

JUSUNG BELLOW, TiN CHAMBER PEDESTAL LIFTER

001-9093-05

WELD BELLOW, JUSUNG, BROOKS ROBOT USE

EV-3M-24

CLIPPARD VALVE, 24V ,  FOR P5000 (N/C)

3870-01445

VALVE ASSY RAPID EXHAUST1/8 NPT, QUICK RELEASE VALVE

0015-70041

ASSY CAM FOLLOWER CROWNE

0040-20146  / 0040-75904

BELLOWS, ORIENTER CHAMBER

0200-09657              

WINDOW,RECESSED ENDPOINT

0020-09005

WINDOW QUARTZ, VIEW PORT

0200-09326              

DC PLUG, POLY GRAPHITE 150MM

0200-10246

GDP, UNI-INSERT, LINER, 88 HOLES, QUARTZ

0200-10243

SHADOW RING, 150MM, FLAT, QUARTZ

0200-10073

INSULATING PIPE, QUARTZ

0200-10133

QUARTZ WINDOW

0090-09016

FEEDTHRU CAP. SENSOR ASSY, OEM NEW

0090-09016

FEEDTHRU CAP. SENSOR ASSY, 2ND NEW

0190-13175  1120-00830

Light Pen, 5V, 20mA, W/Phone Jack Connector

0100-09042

OPTO SENSOR W/PCB ASSY

15-650-PP

LIQUID LEVEL SWITCH

0100-09139

ROBOT INTERCONNECT BD

0100-09080

ROBOT CAP SENSOR INTERCONNECT BD

3310-01022

FLOW INDICATOR

0100-09086

STEPPER POWER DRIVE BOARD

3310-01012

TC GAUGE, 1/8" NPT

3310-01074

TC GAUGE, 1/4"VCR, FEMALE

1140-00023

PWRSP DC QUAD 5V 12V -12V 3.3-24V 350W 85-264VAC IN END-MNT FAN CHASSIS

0150-09054A

CABLE ASSY, RF MATCH, DUAL SHIELDED

0090-09151

P5000 HV CABLE ASSY, FOR SIMPLE CATHODE (ESC )

0620-01245

P5000 HV CABLE ASSY, FOR SIMPLE CATHODE (H.V )

0150-09800

P5000 HV CABLE ASSY, FOR STANDARD CATHODE

0150-70019

37PIN RIBBON CABLE, ROBOT INTERCONNECT BOARD

0140-70085

HARNESS CASSETTE HANDLER INTER. W/BRAKE

0910-01255

FUSE, 1/2A QCK-ACTING, 125V MELF

0910-01256

FUSE, 1A QCK-ACTING, 125V MELF

0910-01253

FUSE, 2A QCK-ACTING, 125V MELF

0910-01277

FUSE, 3A QCK-ACTING, 125V MELF

0910-01254

FUSE, 5A QCK-ACTING, 125V MELF

0910-01287

FUSE, 7A QCK-ACTING, 125V MELF

0190-09372

ASSY, TC, HTR, WxZ

3310-01071

TC GAUGE, 1-1000 MTORR METALTUBE 1/8INCH IPS

1140-01337

POWER SUPPLY DC +5V +12V 150W 85-264VAC FOR ENDPOINT SYSTEM

1400-30700

MAGNET SENSOR ASSY, LIFT CYLINDER, MxP+

0090-75009  0090-02952

MOTOR ENCODER ASSY, P5000 ROBOT, ROTATION

0090-75010  0090-02953

MOTOR ENCODER ASSY, P5000 ROBOT, EXTENSION

715-012143-001

PULLEY SET, 108 TEETH, MOTOR MOUNT, LAM HARMONIC

715-012049-001

PULLEY SET, 15 TEETH, LAM HARMONIC

0150-70018

CABLE ASSY, ENCODER, FLAT FLEX, 34 POS

0150-70017

CABLE ASSY, ENCODER, FLAT FLEX, 6 POS

853-017637-001

STEP MOTOR ASSY, EXT,  PLASTIC CONNECTOR, LAM HARMONIC ARM

853-017637-002

STEP MOTOR ASSY, ROT, PLASTIC CONNECTOR, LAM HARMONIC ARM

0090-75008    0090-02981

MOTOR BRAKE ENCODER ASSY , (FOR STORAGE/CASSETTE ELEVATOR)                                                                                  

3700-01221

SEAL,LINEAR RADIAL 50SFT,  P5000 BEARING ASSY

0020-04160

SPACER CIRCULAR RING, EXT CATHODE , POLYSULFONE, NEW

3700-01484

SEAL DYN EXT RADIAL, 1.241 OD * .998 ID * .235W

3700-01485

SEAL DYN ROT RADIAL, 2.243 OD * 2.0 ID * .235W

0020-04277

FLANGE INSULATING TAPER, EXT CATHODE

0020-03426

PLUG, VESPEL, FOR 200MM PEDESTAL SCREW HOLE

 

這個網誌中的熱門文章

TEL (Tokyo Electron)

'018-002587-1 TOKYO ELECTRON LM GUIDE HSR12R2UUC1ME455LM '020-002708-1 TOKYO ELECTRON SCREW, CAP, M2.6X18, FORK LEVELING '027-001696-1 TOKYO ELECTRON O-RING P-38 BLK '03-254917-00 TOKYO ELECTRON CABLE ASSY TOPLID NANO '1110-101829-21 TOKYO ELECTRON CAP '1D05-300148-11 TOKYO ELECTRON RING, INSULATER B3 (DRM2) '1D80-002701-11 TOKYO ELECTRON CAPACITANCE MANOMETER GAU '1D80-004692-12 TOKYO ELECTRON VALVE GATE '1D86-003807-12X TOKYO ELECTRON HEATER '1D86-003812 TOKYO ELECTRON COUPLER DRM WALL TC '2110-223577-12 TOKYO ELECTRON TABLE QUARTZ PEDESTAL '2185-034374-12 TOKYO

AMAT surplus -new

'0010-02170 APPLIED MATERIALS WRIST ASSY,LEFT,HP+ROBOT '0010-02475 APPLIED MATERIALS ASSY,VALVE MECHANICAL '0010-02768 APPLIED MATERIALS V-ELECTRODE W/IEP (EYEDEND-POINT) OPTION '0010-07946 APPLIED MATERIALS R ASSY. ESC/RF 200MM '0010-09088 APPLIED MATERIALS TOOL ASSY P5000 ROBOT ALIGNME '0010-09672 APPLIED MATERIALS PLASMA SENSOR ASSY,PRSP '0010-10874 APPLIED MATERIALS 51N RF COIL ASSY DPS2 '0010-10964 APPLIED MATERIALS ASSY,FAN ROT INTRLK '0010-10973 APPLIED MATERIALS ASSEMBLY, HOT DETECTOR '0010-12090 APPLIED MATERIALS MATCH MXP+DIGITAL '0010-13774 APPLIED MATERIALS WAFER WAFER LIFT &#

KOFLOC 3810M - on sale

KOFLOC 3810M , new / used on sale Spec: 60SLM