0021-34033 | 0021-34033/MEMBRANE CONTOUR 5ZONE |
0040-88855 | 0040-88855/LAMP HOUSING,BRAZED FLEX |
0200-07761 | 0200-07761/PIN ANTENNA POLI SI 300MM |
0200-04877 | 0200-04877/SINGLE RING CERAMIC |
0200-84596 | 0020-84596/FACEPLATE SILANE |
0010-44213 | 0010-44213/PROBE,300MM RADIANCE RTP |
0190-41005 | 0190-41005/CHILLER INR-496-003D |
0190-38517 | 0190-38517/Lamp 10-Pack For Spike(new) |
0190-22509 | 0190-22509/LAMP,USHIO BNA6,EPI |
839-019090-328 | E chuck 328 Sputtering Target |
716-012640-012 | WDO,GAS INJ,FACE SEAL,QRTZ,NSG |
839-044157-031 | UPPER ELECTRODE INNER/839-044157-031 |
715-801021-838 | LAM Liner 2300 upper chamber coated |
0190-09248 | TC PROBE.CHUCK ASP p/n 0190-09248 |
0200-09757 | RING, CLAMPING, FLAT, AL, 150MM, .95 HT, FINGER |
1010-01088 | LAMP BULB 2P-TUNGST 120V 1KW 1500HR-LF AMAT PN:1010-01088 |
0100-20070 | Mag/Lamp Driver PN:0100-20070 |
3690-02620 | Mounting bolts for Ceramic clamp ring 3690-02620 |
0200-00410 | Process Kit 150 mm MxP+ (UNI-INSERT GAS Distribution 88 Holes 0200-00410 |
0200-10243 | SHADOW RING, QUARTZ, 150MM, FLAT(1S) |
0200-10073 | INSULATOR QUARTZ 200MM SIMPLE CATHODE |
0200-10133 | Window Recessed Endpoint GECO 0200-10133 |
0020-31493 | GAS DISTRIBUTION PLATE, UNILID, 133 HOLES 0020-31493 |
0200-09789 | COVER, QUARTZ, 6", STEPPED, LIFT 2,FLAT |
0020-34044 | AMAT PN:0020-34044 Blok RF Insulator, Bottom |
0020-34043 | AMAT PN:0020-34043 Cover, Insulator Blok |
0020-34831 | AMAT PN:0020-34831 RF/HV Mounting Plate |
0020-34694 | LINER GDP R2 OXIDE GEC |
0020-34695 | LINER CATHOD FULL FLOW OXIDE ETCH |
0020-34696 | LINER,SLIT VALVE |
0200-03312 | AMAT, HOOP 140 FIXED FLOATING, 300MM PRODUCER |
0200-03313,/ 0200-05621 | Floating Ring |
0200-03314 | Lift Pin |
0040-53688 | Gas Box |
0200-04235 | ISOLATOR, CERAMIC, 300MM PRODUCER |
0021-06499 | Gas feedthrough(Teflon) |
0200-05623 | Top Liner |
0200-03313 | Floating Ring |
0200-02396 | LINER, CERAMIC MIDDLE, PRODUCER SE |
0200-03414 | Ceramic Bottom |
0200-03406 | Pumping Ring Side 1 |
0200-03407 | Pumping Ring Side 2 |
0020-63185 | Blocker Plate |
0020-49785 | Shower Head |
0200-04118 | RF Isolator |
0040-63108 | Manifold RPS II Side 1 |
0040-63107 | Manifold RPS II Side 2 |
0200-01766 | Manifold Ceramic,RPS |
0200-01991 | Lift Ring |
0200-02395 | Liner Ceramic Top Producer SE |
0200-02397 | LINER, CERAMIC BOTTOM, PRODUCER SE , |
0200-02407 | Pumping Ring Ceramic C-Channel Side 1 |
0200-02408 | PUMPING RING, CERAMIC C-CHANNEL, SIDE 2 |
0021-12790 | Blocker Plate |
0020-84596 | Shower Head |
0200-02469 | Manifold Ceramic,RPS |
839-020965-005 | ASSY,ELCTD,OUTER,.18 STEP,INTL |
716-053569-020 | RING,QTZ,BKG PLT, GUARD, NCH |
716-017581-002 | RING,ELCTD,2PIECE |
716-017112-430 | RING,WAP,17.07X1.10THK,AN SLT,300MM |
716-014843-001 | RING,WAP,QTZ,GENERIC,17IN,DFC |
716-044668-930 | Silicon Edge Ring |
716-037793-002 | B,FOCUS, R CVR,DFC 300MM |
716-031257-531 | Top Edge Ring |
716-026652-902 | Bottom Edge Ring |
716-003481-815 | Ceramic Window |
716-012639-117 | Dual Zone Injector |
839-019090-374 | ESC |
716-031257-309 | RING,EDGE, TOP, 2300 |
716-026652-002 | RING,EDGE,BOT,200-300MM |
716-012639-024 | GAS INJECTOR FOR LAM2300 |
0200-10466 | Insert Ring, Silicon, 200mm, Notch(2) |
0200-35801 | Window, Recessed Endpoint, 4mm APERT |
0200-09598 | VESSEL SINGLE H2O VDSII |
0200-25279 | |
0040-21178 | BELL JAR, CERAMIC 200MM |
0200-00221 | CERAMIC INSULATOR |
0200-00218 | COVER TOP CERAMIC |
0200-00406 | BUSHING PEDESTAL PC II |
0200-39137 | Dome Ceramec, DPS Chamber |
0200-00149 | Quartz Tube Applicator ASP+ |
0200-10160 | Ceramic Liner(SiH4) |
0200-10157 | Liner Junction SiN Dxz |
0200-00296 | Sleeve Junction SiN Dxz |
0200-10169 | Edge Ring Ceramic Lock Down |
0200-10284 | Pin, Lifthea Ter, Dxz |
0200-36631 | Plate Cover, 8" Heater, Dxz, Patterned AL |
0200-10164 | Shield, Pumping Insert, SIN, Dxz |
0200-39324 | Ceramic Insertring |
0200-35292 | Window, Endpoint, DPS MEC |
0200-35294 | Quartz Lower Chamber VPRT DPS |
0200-00247 | Ring, Capture, 195MM SNNF Ceramic, DPS |
0200-39133 | Window Endpoint Inner DPS MEC |
0200-39134 | Window Endpoint Outer DPS MEC |
0200-35291 | Plug, Gas Nozzle, DPS MEC |
0020-33804 | Adapter, Gas Feed, DPS MEC |
0200-05376 | Quartz Tube, Applicator ASP+/0200-00149 |
0020-33815 | Plate, Blankoff, DPS MEC |
0200-35293 | Window, Manometer Port, DPS MEC |
0200-09201 | Plate Gas Dist, Lower QTZ 8" |
0200-09478 | Plate, Gas Dist, Upper 200MM PRSP |
0020-70285 | Blade 8" Buffer Frog Leg |
0200-39140 | Rough Ring, Focus, Esc |
0200-09444 | CAP QTZ,TOP 25MM TUBE ASP |
0200-36680 | LINER QUARTZ,UPPER,GAS DIST,GROUND |
0200-36682 | LINER QUARTZ,LOWER,GAS DIST,GROUND |
0200-10324 | Dome, Ceramic, Dps Chamber, R1 Rough KC |
0200-02116 | INJECTOR, GAS, 24 HOLES, .020 DIA, .68 L. |
0200-10263 | WASHER, INSULATING, CERAMIC. |
1D10-315183-15 | SHIELD DEPO 85-M4(Y2-Y)(DRM2) |
1D10-102848-13 | PLATE BAFFLE M-9(Y2-Y)(DRM2) |
0200-35843 | TOP Cerimic Pumping |
0200-36696 | SHADOW RING QUARTZ 200MM NOTCH |
0200-00051 | WINDOW, LID ENDPOINT, QTZ. EMAX 200MM, NEW |
0200-02117 | INJECTOR GAS SEAL BLANK-OFF CERAMIC |
0200-00033 | EXT, QUICKK RELEASE, EP WIND, CT+, NEW |
0200-01357 | INSULATOR CERAMIC LIFT PIN ESC ASSEMBLY |
0200-00250 | RING CAPTURE C-ESC SNNF 200MM METAL |
0020-39137 | DOME CERAMIC DPS CHAMBER |
0200-01195 | WINDOW, IEP 300MM DPS2 |
0200-01903 | INSULATOR PEDESTAL QUARTZ 300MM PCII |
0200-01903 | INSULATOR PEDESTAL QUARTZ 300MM PCII |
0200-01942 | LIFT PIN TIP, MAG LIFT, GROUND, 300MM |
0200-03736 | COLLAR 300MM PRODUCER ETCH |
0200-06863 | Deposition ring |
0200-07238 | INSULATOR EXTERNAL |
0200-07359 | INSULATOR, INTERNAL |
0200-09716 | Lift Pin Type |
0200-10143 | Ceramic insert ring |
0200-10163 | ISOLATOR SIN ENHANCED PUMPING LID DXZ; |
0200-36630 | Cover plate |
0040-03771 | Lid plate |
0200-10286 | Heater base >>Ring, Finger Lift Plate |
0020-10158 | Junction sleeve (inside pumping port) |
0020-09373 | SEAL, SMALL FACE |
0020-31997 | PEDESTAL, 150MM, AL, FLAT, FINGER |
0030-00195 | LARGE FACE SEAL 150MM |
0200-09636 | PLUG,SIC W/HEAD |
0200-09735 | COVER, CLAMPING RING, 150 MM, CERAMIC |
0200-09758 | COLLAR, 150MM PEDESTAL, AL, FINGER |
0200-09759 | SHIELD, 150MM PEDESTAL, AL, FINGER |
0200-09602 | PIPE, INSULATING, QUARTZ W/FLANGE |
0020-31613 | CYLINDER, LIFT, ALUM, 150MM |
0020-31774 | CYLINDER, HOT INNER |
0020-30347 | CYLINDER, EXTERNAL |
0020-09031 | INSULATING WASHER |
0200-09447 | PLATE QTZ,GAS DIST,UPPER 150MM ASP |
0200-09448 | PLATE QTZ,GAS DIS,LOWER 150MM ASP |
0200-05377 | TUBE PLASMA,25MM FOR P-5000 |
0200-09074 | WINDOW WINDOW HTR 200mm |
0020-31500 | FINGER,CHUCK 1500MM,ASP |
0200-09441 | WINDOW, SLIT, PRSP |
0020-30958 | FILTER, SLIT WINDOW,PRSP |
0021-09097 | PLATE, LINER ALIGNMENT, |
0200-10246 | UNI-INSERT,GDP,LINER,88 HOLD, QTZ |
0010-10982 | SHELL ASSY,150MM,FLAT(1S),5.679DIA,5MIC |
0010-10529 | PEDESTAL ASSY, 150 mm FLAT(1S),NI LIFT |
0200-09898 | PLUG, BIAS, EXT PEDESTAL, GRAPHITE |
0020-31740 | VESPEL SCREW |
0020-32049 | CAP, VESPEL,ESC |
0200-09785 | CAP, 8,ESC,QUARTZ |
0200-09657 | WINDOW, RECESSED, ENDPOINT |
0200-09782 | PIPE,INSULATING,QUARTZ,LIFT,ESC |
0020-31739 | CARRIER,ESC,FOCUS RING |
0020-31633 | LIFT PIN, CONDUCTIVE |
0020-32047 | POST, LOWER, 2 PC, EXT PEDESTAL, LIFT |
0020-32048 | POST, UPPER, 2-PIECE |
0020-32046 | BASE EXTENSION ESC FOCUS RING |
0020-31737 | INSULATING FLANGE, TAPERED, ESC, TSB |
0020-30198 | TUBE EXTERNAL TAPERED EXT CATHODE |
0021-09104 | LINER CATHODE ALIGNED OXIDE ETCH |
0040-33998 | LINER SLIT LINER DOOR (WALL LINER) |
0021-06092 | DOOR SLIT LINER |
0021-09718 | LINER,SLIT VALVE(OBS 0020-34696) |
BS02-00001 | SHADOW RING, QUARTZ, 150MM, FLAT(1S) |
BS10-00001 | SHELL ASSY,150MM,FLAT(1S),5.679DIA,5MIC (SEC) |
0040-31844 | Bellow |
3020-01125 | CYL AIR 50MMBORE 35MMSTRK DBL-ACTW/AUTO-SW&CONN |
0010-10185 | Throttle Valve Drive ASSY |
0021-09105 | Lift Pin |
0020-34040 | Lift Pin (fixed) |
0200-00250 | Capture ring |
0010-02609 | Liner Cathode Magnet Super-e |
0200-01511 | Top Ring, NM, 200MM, OXIDE |
0200-01509 | INSERT RING, NM, 200MM NOTCH(2) TG, Super-e |
0200-01119 | SHADOW RING, QUARTZ, 200MM, NOTCH(2) TG, Super-e |
0200-03319 | WINDOW, RECESSED, ENDPOINT |
0200-02527 | 300MM QUARTZ ROBOT BLADE |
0200-02407 | Pumping Ring Ceramic C-Channel Side 1 |
0200-02408 | PUMPING RING, CERAMIC C-CHANNEL, SIDE 2 |
0200-02973 | LINER, CERAMIC Middle, PRODUCER SE , |
0200-02974 | LINER, CERAMIC BOTTOM, PRODUCER SE , |
0200-10296 | INSULATOR BULKHEAD CATHODE DPS |
0200-35623 | INSERT RING, SILICON, 6" APPLIED MATERIALS |
0200-76068 | SHADOW RING QUARTZ 150MM APPLIED MATERIALS |
0190-02853 | 6" VAT GATE H-ANODAZED , PERF , AMAT P5000 |
0040-09069 | CABLE ASSY, STAINLESS WIRES, AMAT P5000 |
0020-32364 | BRACKET, RECESSED ENDPOINT, AMAT P5000/P5200 |
0050-30761 | TUBE, GAS SUPPLY, SGD, AMAT P5000/P5200 |
715-011531-008 | UPPER ELECTRODE , RAINBOW 4420 |
718-098591-001 | SEAL PLATE, S-65 PENDULUM VALVE (VAT P/N : 200500 ), LAM TCP9600 |
718-098592-001 | LOCK RING, S-65 PENDULUM VALVE (VAT P/N : 202046 ), LAM TCP 9600 |
0020-32836 | HINGE, REMOVABLE, RIGHT SLIT VALVE, AMAT P5000 |
0020-32837 | HINGE, REMOVABLE, LEFT SLIT VALVE, AMAT P5000 |
0010-70161 | DOOR, SLIT VALVE ASSY, AMAT P5000 |
00020-31490 | GDP, 37 HOLES, MxP, T=0.078", AMAT P5000 MxP |
0020-70433 | HINGE, RIGHT SLIT VALVE |
0020-70432 | HINGE, LEFT SLIT VALVE |
0010-09088 | P5000 ROBOT ALIGNMENT TOOL |
5010-01017 | THREAD LOCKING BEARING ( FOR P5000 ROBOT BLADE) |
0010-10982 | Shell ESC ASSY, MxP+, OXIDE, 150MM, FLAT, BRAND NEW |
0200-34040 | LIFT PIN, A6061+ANOD, L=50MM |
0021-09105 | LIFT PIN, A6061+ANOD, L=56MM, ADJUSTABLE |
0020-32260 | GDP, 37 HOLES, MxP, T=0.156", AMAT MxP |
0020-31493 | GDP, 133 HOLES, T=0.078", AMAT MxP |
0010-75100 | THROTTLE VALVE ASSY, MxP |
0020-32259 | GDP, 119 Holes, T=0.156", AMAT MxP |
0020-31463 | CARRIER CLAMP, COMPLIANT, EXT CATHODE |
0020-30482 | COUPLING FLEX |
0020-30198 | TUBE EXTERNAL TAPERED EXT CATHODE |
0020-31147 | INSERT BASE AL 150/200MM FLAT (Extender Cathode Cylinder (Poly M-Chuck) |
0020-31767 | CYLINDER, CLAMPING ,200MM POLY/WSI |
0010-09985 | PEDESTAL ASSY, 200MM, POLY/WSI, NOTCH, 2 |
839-093786-001 | Bellow, VAT Gate Valve, 149.1mm, Short Adaptor |
0015-09055 | Sleeve Susceptor Bellow |
3870-03605 | Cylinder ,HDP Gate Valve |
0015-09056 | Wafer Lift Bellow, CVD Chamber |
0015-09056 | Wafer Lift Bellow, CVD Chamber |
80-080-072 | Pin Cylinder, Tegal 90X |
80-080-077 | Chuck Cylinder, Tegal 90X |
3422001501 | JUSUNG BELLOW, O3 CHAMBER PEDESTAL LIFTER |
34220012 | JUSUNG BELLOW, TiN CHAMBER PEDESTAL LIFTER, TUBE |
34220016 | JUSUNG BELLOW, TiN CHAMBER PEDESTAL LIFTER |
001-9093-05 | WELD BELLOW, JUSUNG, BROOKS ROBOT USE |
EV-3M-24 | CLIPPARD VALVE, 24V , FOR P5000 (N/C) |
3870-01445 | VALVE ASSY RAPID EXHAUST1/8 NPT, QUICK RELEASE VALVE |
0015-70041 | ASSY CAM FOLLOWER CROWNE |
0040-20146 / 0040-75904 | BELLOWS, ORIENTER CHAMBER |
0200-09657 | WINDOW,RECESSED ENDPOINT |
0020-09005 | WINDOW QUARTZ, VIEW PORT |
0200-09326 | DC PLUG, POLY GRAPHITE 150MM |
0200-10246 | GDP, UNI-INSERT, LINER, 88 HOLES, QUARTZ |
0200-10243 | SHADOW RING, 150MM, FLAT, QUARTZ |
0200-10073 | INSULATING PIPE, QUARTZ |
0200-10133 | QUARTZ WINDOW |
0090-09016 | FEEDTHRU CAP. SENSOR ASSY, OEM NEW |
0090-09016 | FEEDTHRU CAP. SENSOR ASSY, 2ND NEW |
0190-13175 1120-00830 | Light Pen, 5V, 20mA, W/Phone Jack Connector |
0100-09042 | OPTO SENSOR W/PCB ASSY |
15-650-PP | LIQUID LEVEL SWITCH |
0100-09139 | ROBOT INTERCONNECT BD |
0100-09080 | ROBOT CAP SENSOR INTERCONNECT BD |
3310-01022 | FLOW INDICATOR |
0100-09086 | STEPPER POWER DRIVE BOARD |
3310-01012 | TC GAUGE, 1/8" NPT |
3310-01074 | TC GAUGE, 1/4"VCR, FEMALE |
1140-00023 | PWRSP DC QUAD 5V 12V -12V 3.3-24V 350W 85-264VAC IN END-MNT FAN CHASSIS |
0150-09054A | CABLE ASSY, RF MATCH, DUAL SHIELDED |
0090-09151 | P5000 HV CABLE ASSY, FOR SIMPLE CATHODE (ESC 段) |
0620-01245 | P5000 HV CABLE ASSY, FOR SIMPLE CATHODE (H.V 段) |
0150-09800 | P5000 HV CABLE ASSY, FOR STANDARD CATHODE |
0150-70019 | 37PIN RIBBON CABLE, ROBOT INTERCONNECT BOARD |
0140-70085 | HARNESS CASSETTE HANDLER INTER. W/BRAKE |
0910-01255 | FUSE, 1/2A QCK-ACTING, 125V MELF |
0910-01256 | FUSE, 1A QCK-ACTING, 125V MELF |
0910-01253 | FUSE, 2A QCK-ACTING, 125V MELF |
0910-01277 | FUSE, 3A QCK-ACTING, 125V MELF |
0910-01254 | FUSE, 5A QCK-ACTING, 125V MELF |
0910-01287 | FUSE, 7A QCK-ACTING, 125V MELF |
0190-09372 | ASSY, TC, HTR, WxZ |
3310-01071 | TC GAUGE, 1-1000 MTORR METALTUBE 1/8INCH IPS |
1140-01337 | POWER SUPPLY DC +5V +12V 150W 85-264VAC FOR ENDPOINT SYSTEM |
1400-30700 | MAGNET SENSOR ASSY, LIFT CYLINDER, MxP+ |
0090-75009 0090-02952 | MOTOR ENCODER ASSY, P5000 ROBOT, ROTATION |
0090-75010 0090-02953 | MOTOR ENCODER ASSY, P5000 ROBOT, EXTENSION |
715-012143-001 | PULLEY SET, 108 TEETH, MOTOR MOUNT, LAM HARMONIC |
715-012049-001 | PULLEY SET, 15 TEETH, LAM HARMONIC |
0150-70018 | CABLE ASSY, ENCODER, FLAT FLEX, 34 POS |
0150-70017 | CABLE ASSY, ENCODER, FLAT FLEX, 6 POS |
853-017637-001 | STEP MOTOR ASSY, EXT, PLASTIC CONNECTOR, LAM HARMONIC ARM |
853-017637-002 | STEP MOTOR ASSY, ROT, PLASTIC CONNECTOR, LAM HARMONIC ARM |
0090-75008 0090-02981 | MOTOR BRAKE ENCODER ASSY , (FOR STORAGE/CASSETTE ELEVATOR) |
3700-01221 | SEAL,LINEAR RADIAL 50SFT, P5000 BEARING ASSY |
0020-04160 | SPACER CIRCULAR RING, EXT CATHODE , POLYSULFONE, NEW |
3700-01484 | SEAL DYN EXT RADIAL, 1.241 OD * .998 ID * .235W |
3700-01485 | SEAL DYN ROT RADIAL, 2.243 OD * 2.0 ID * .235W |
0020-04277 | FLANGE INSULATING TAPER, EXT CATHODE |
0020-03426 | PLUG, VESPEL, FOR 200MM PEDESTAL SCREW HOLE |
'0.1UM ENTEGRIS FILTER 3/4 '1220-269 ENTEGRIS ENTEGRIS SPLASH GUARDS(DELETED) '151-140-01 ENTEGRIS 01KIT,DISP.HEAD KEY,CHNG-OUT,NITRIC ACID '151-140-02 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,H2S04 '151-140-03 ENTEGRIS KIT,DISP.HEAD KEY, AMMONIUM HYDROXIDE29% '151-140-05 ENTEGRIS DHT KEY CODE RING, HCL '151-140-06 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,HF49% '151-140-08 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,H3P04-85% '151-140-09 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,H202 31% '151-140-10 ENTEGRIS KIT,DISPENSE HEAD KEY CODE RING '151-140-13 ENTEGRIS KIT,DISP.HEAD KEY,CHNG-OUT,IPA '151-14