| 品名 | 原廠料號 | 庫存數量 |
| KAYDON BEARING KA060XPO | KA060XPO/0190-70076 | 51 |
| KAYDON BEARING KAA10AGO | KAA10AGO/0190-70075 | 70 |
| BEARING BLADE 0190-70070 | 0190-70070 | 8 |
| BEARING SFR1883 | SFR1883 | 21 |
| KAYDON BEARING 15831001 | 15831001/0190-75080 | 3 |
| KAYDON BEARING 15282001 | 15282001 ZA060ANO/0190-35019 | 54 |
| BALL BERAING | 0190-00958 | 15 |
| BLOCKER PLATE | 0020-34445 | 36 |
| SHOWERHEAD 0021-38119 (9230) | 0021-38119 | 16 |
| BLOCKER 0020-34775 (9221) | 0020-34775 | 4 |
| SHOWERHEAD 0021-00041 (9231) | 0021-00041 | 4 |
| BLOCKER PLATE 0021-35087 (9237 | 0021-35087 | 5 |
| SHOWERHEAD 0021-01813 (9296) | 0021-01813 | 3 |
| Pedestal | 0200-31997 | 1 |
| GRAD FOR MATRIX 0992-70275 | 0992-70275(8006小孔) | 66 |
| GRAD FOR MATRIX 0992-70276 | 0992-70276(8007大孔) | 69 |
| | 0021-09758B | 8 |
| BLOCK RF SPRING 0200-73087 | 0200-73087 | 190 |
| Wpedestal | 0020-31997 | 1 |
| End effector Pad | 0190-71233(Round type) | 4 |
'018-002587-1 TOKYO ELECTRON LM GUIDE HSR12R2UUC1ME455LM '020-002708-1 TOKYO ELECTRON SCREW, CAP, M2.6X18, FORK LEVELING '027-001696-1 TOKYO ELECTRON O-RING P-38 BLK '03-254917-00 TOKYO ELECTRON CABLE ASSY TOPLID NANO '1110-101829-21 TOKYO ELECTRON CAP '1D05-300148-11 TOKYO ELECTRON RING, INSULATER B3 (DRM2) '1D80-002701-11 TOKYO ELECTRON CAPACITANCE MANOMETER GAU '1D80-004692-12 TOKYO ELECTRON VALVE GATE '1D86-003807-12X TOKYO ELECTRON HEATER '1D86-003812 TOKYO ELECTRON COUPLER DRM WALL TC '2110-223577-12 TOKYO ELECTRON TABLE QUARTZ PEDESTAL '2185-034374-12 TOKYO