| | TMP | |
| No | Maker | Model |
| 1 | Mitsubishi | FT 600D |
| 2 | Mitsubishi | FT 600D |
| 3 | Mitsubishi | PT-50-A200 |
| 4 | Mitsubishi | PT-50-A200 |
| 5 | Mitsubishi | PT-50-A200 |
| 6 | Mitsubishi | PT-50-A200 |
| 7 | Mitsubishi | FT 300W |
| 8 | Mitsubishi | FT 300W |
| 9 | Mitsubishi | PT-50-A200 |
| 10 | SEIKO SEIKI | STP HI |
| 11 | SEIKO SEIKI | STP HI |
| 12 | SEIKO SEIKI | STP 301CVB |
| 13 | SEIKO SEIKI | STP 2000 |
| 14 | SEIKO SEIKI | STP H200CV |
| | | |
| No | Maker | Model |
| 1 | Mitsubishi | FT 600D |
| 2 | Mitsubishi | FT 600D |
| 3 | Mitsubishi | FT 600D |
| 4 | Mitsubishi | PT 50 |
| 5 | Mitsubishi | PT 50 |
| 6 | Mitsubishi | PT 50 |
| 7 | Mitsubishi | PT 50 |
| 8 | Mitsubishi | PT 50 |
| 9 | Mitsubishi | FT 300W |
| 10 | Mitsubishi | FT 300W |
| 11 | SEIKO SEIKI | STP 301CVJ |
| 12 | SEIKO SEIKI | STP HI301LI |
| 13 | SEIKO SEIKI | STP HI301LI |
| 14 | SEIKO SEIKI | STP H |
| | | |
| | DRY PUMP | |
| No | Maker | Model |
| 5 | EDWARDS | DP80+QMB |
| 6 | EDWARDS | ESDP |
| 7 | EDWARDS | QDP 80 |
| 8 | EDWARDS | QDP 40 |
| 10 | EDWARDS | DP80+QMB |
| 11 | EDWARDS | QDP 40 |
| 2 | KASHIYAMA | KRS 1800 |
| 1 | LEYBOLD | D40BCS |
| 3 | LEYBOLD | D65B |
| 4 | LEYBOLD | D |
| 9 | LEYBOLD | WS 501 |
'018-002587-1 TOKYO ELECTRON LM GUIDE HSR12R2UUC1ME455LM '020-002708-1 TOKYO ELECTRON SCREW, CAP, M2.6X18, FORK LEVELING '027-001696-1 TOKYO ELECTRON O-RING P-38 BLK '03-254917-00 TOKYO ELECTRON CABLE ASSY TOPLID NANO '1110-101829-21 TOKYO ELECTRON CAP '1D05-300148-11 TOKYO ELECTRON RING, INSULATER B3 (DRM2) '1D80-002701-11 TOKYO ELECTRON CAPACITANCE MANOMETER GAU '1D80-004692-12 TOKYO ELECTRON VALVE GATE '1D86-003807-12X TOKYO ELECTRON HEATER '1D86-003812 TOKYO ELECTRON COUPLER DRM WALL TC '2110-223577-12 TOKYO ELECTRON TABLE QUARTZ PEDESTAL '2185-034374-12 TOKYO