1. UV lamp (op3xxx, op5xxx)
(1) 29-013586 : for op3xxx
(2) 18-020285 : for op5xxx
2. Reference chip
(1) 18-020397 REFERENCE Assembly,SAMPLES,A,W,R (op2xxx & op3xxx)
(2) 18-013761 REFERENCE Assembly,BLOCK,FINE-Z (op5xxx & op7xxx)
3. Therma-wave “Standard Calibration Wafer” set
4. Light pen (30-012197) : for all therma-wave tool and applied equipment
5. Optical alignment kit : for Therma-wave equipment