| 0020-22920 | shield 6" preclean,6inch |
| 0020-26967 | PCⅡ GAS TRENCH COVER, |
| 3700-01415 | Silicon Oring, |
| 3700-01615 | Chamber Lid Oring, O RING, |
| 0040-20146 | wafer Orienter Bellows, |
| 3700-01395 | Passthrough/Cooldown O-ring, |
| 0015-20038 | Modified Pulley(Orienter rotation Motor Pulley), |
| 3700-01229 | wafer Orienter Bellows o-ring, ORING ID 1.609 CSD .139 VITON |
| 0950-01449 | Laser Diode Intergrated Circuit |
| 1010-01116 | Halogen Lamp 120V 800W |
| 3080-01030 | Drive Belt |
| 3700-01173 | LLC door oring, |
| 3700-01370 | o-ring （Indexer mount to LLC）, ORING ID 5.359 CSD .139 VITON 75DURO BLK |
| 3080-01050 | Pulley Belt, |
| 0100-09042 | Opto Switch PCB Assembly, |
| 0020-21024 | 6"Transfer Blade Clamp, |
| 0020-20354 | 6"Transfer Blade Upper Clamp, |
| 0020-21033 | 6"Transfer Blade |
| 0020-70271 | Left Pivot |
| 0020-70272 | Right Pivot |
| 0020-20349 | Duplex Clamp |
| 0190-70075 | LVP Grease Ball Bearing |
| 3780-01107 | Spring(SPR EXT .500FLX.0930DX.012wire-DIA sst) |
| 0010-70247 | Laser Optics Assembly |
| 0100-20069 | Wafer Orienter PCB, |
| 0100-20068 | CCD Array PCB |
| 3610-01033 | Timing Belt Pulley |
| 0090-20004 | Indexer Motor Assembly |
| 0020-21112 | 6" Buffer Blade Bottom Clamp |
| 0020-21113 | 6" Buffer Blade Upper Clamp |
| 0020-21114 | 6" Buffer Blade |
| 0010-00827 | CLIP ASSY LOWER |
| 0030-00237 | PEDESTAL RING.BOTTOM |
| 0030-00242 | SCREW COVER.1/4-20 SKT HD.MOLDED |
| 715-011781-001 | PLUGER. 1/4 TURN (.609 LG) |
| 754-090359-015 | SPRING. COMP. 3/8 DIA x 1-3/4 LG |
'018-002587-1 TOKYO ELECTRON LM GUIDE HSR12R2UUC1ME455LM '020-002708-1 TOKYO ELECTRON SCREW, CAP, M2.6X18, FORK LEVELING '027-001696-1 TOKYO ELECTRON O-RING P-38 BLK '03-254917-00 TOKYO ELECTRON CABLE ASSY TOPLID NANO '1110-101829-21 TOKYO ELECTRON CAP '1D05-300148-11 TOKYO ELECTRON RING, INSULATER B3 (DRM2) '1D80-002701-11 TOKYO ELECTRON CAPACITANCE MANOMETER GAU '1D80-004692-12 TOKYO ELECTRON VALVE GATE '1D86-003807-12X TOKYO ELECTRON HEATER '1D86-003812 TOKYO ELECTRON COUPLER DRM WALL TC '2110-223577-12 TOKYO ELECTRON TABLE QUARTZ PEDESTAL '2185-034374-12 TOKYO