| Item | Tool type | Description | AMAT # |
| 1 | Super-e | Shadow ring | 0200-01119 |
| 2 | Super-e | QUARTZ INSULATOR | 0200-10073 |
| 3 | ASP+ | LOWERG.D.P | 0200-09201 |
| 4 | Super-e | Top ring | 0200-01511 |
| 5 | ASP+ | Plate,Gas Distribution Upper, | 0200-09478 |
| 6 | Super-e | N.M insert RING | 0200-01509 |
| 7 | Super-e | UNI-INSERT,GAS DISTRIBUTION,88 HOLES,QTZ | 0200-00410 |
| 8 | Super-e | WINDOW, RECESSED ENDPOINT, | 0200-35801 |
| 9 | Emax | Shadow Ring | 0200-01463 |
| 10 | Emax | L-shape Cover Ring 63RA,200 mmeMAX | 0200-02124 |
| 11 | Emax | Insert ring, NM,l SHAPE | 0200-02385 |
| 12 | DPS+ Poly | Single Ring Ceramic Poly | 0200-10377 |
| 13 | DPS+ Poly | Window Endpoint DPS MEC | 0200-35292 |
| 14 | DPS+ poly | Housing,Gas Feed,DPS Poly | 0200-35295 |
| 15 | DPS+ poly | Plug,Inner,Gas Feed Assy | 0200-35296 |
| 16 | DPS+ Poly | Dome,Ceramic,2.75 DIA Window DPS | 0200-35956 |
| 17 | DPS+ Poly | Aperture Ceramic Cover IEP 2.75""WIN" | 0200-39296 |
| 18 | DPS+ metal | Focus Ring | 0200-00137 |
| 19 | DPS+ metal | Dome | 0200-10324 |
| 20 | DPS+ metal | Housing,Gas Feed,DPS MECC hamber | 0200-35290 |
| 21 | DPS+ metal | Plug,Inner,Gas Feed Assy | 0200-35291 |
| 22 | DPS+ metal | Quartz Lower Chamber VPRTDPS | 0200-35294 |
| 23 | DPS+ metal | RING,CAPTURE C-ESC,SNNF, | 0200-00250 |
| 24 | DPS+ | Window Manometer plug | 0200-39135 |
| 25 | DPS+ | EDP plug | 0200-39133 |
| 26 | ASP+ | TOP CAP | 0200-09444 |
| 27 | ASP+ | Liner,quart,upper GasDIST,Ground,ASP+ | 0200-36680 |
| 28 | ASP+ | LINE RQ'TZ LOWER GAS DIST GROUND ASP | 0200-36682 |
| 29 | ASP+ | QUARTZ TUBE,APPLICATOR ASP+ | 0200-05376 |